Flow sensor

• US 4,478,077 A
• Filed: 09/30/1982
• Issued: 10/23/1984
• Est. Priority Date: 09/30/1982
• Status: Expired due to Term

• Current Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Original Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Inventors: Bohrer, Philip J., Johnson, Robert G.
• Primary Examiner(s): Goldstein, Herbert
• Application Number:
  US06/431,538
• Time in Patent Office: 754 Days
• Field of Search: 73/204, 338/22.5 SD, 338/25, 338/292, 338/293, 338/308, 338/309, 338/318, 357/28, 357/55, 357/82
• US Class Current: 73/204.26
• CPC Class Codes: G01F 1/6845 Micromachined devices
• CPC Class Codes: G01F 1/696 Circuits therefor, e.g. constant-current flow meters
• CPC Class Codes: G01F 1/698 Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
• CPC Class Codes: G01F 1/699 by control of a separate heating or cooling element

Abstract

A flow sensor comprising a pair of thin film heat sensors and a thin film heater is disclosed. The flow sensor further comprises a semiconductor body with a depression therein and structure connecting the heater and the sensors to the body and bridging the depression so that at least a major portion of the heater and the sensors are out of contact with the body. The sensors are disposed on opposite sides of the heater, the structure connecting comprising two thin film members bridging the depression, each member comprising one sensor and a portion of the heater.

Claims

1. A flow sensor, comprising:

a thin film heater;

a pair of thin film sensors;

a semiconductor body with a depression therein;

and

means connecting the heater and the sensors to the body and bridging the depression so that at least a major portion of the heater and the sensors are out of contact with the body and with the sensors disposed on opposite sides of the heater, the means connecting comprising two thin film members bridging the depression, each member comprising one sensor and a portion of the heater.

4. The apparatus of claim 1, 2, or 3 wherein the heater is operated at a temperature elevated above ambient, thus creating a no-flow temperature gradient in the air above and adjacent to the heater, the temperature within the no-flow gradient making a transition between the elevated temperature and substantially ambient temperature, the sensors being located sufficiently close to the heater to be located substantially within the no-flow temperature gradient.

5. The apparatus of claim 1, 2, or 3 wherein the sensors are located from the heater at a preferred distance which, when contrasted to an alternate distance, provides a substantially greater change in the heat being delivered to the sensors for a given change in flow rate.

6. The apparatus of claim 1, 2, or 3 wherein the proximal edges of the sensors are located from the near edges of the heater at a distance within the range of approximately 5 microns to approximately 25 microns.

7. The apparatus of claim 1, 2, or 3 wherein the heater and each sensor comprise a resistive element having a pattern of resistive material formed in lines having a line width, the lines being separated by substantially a line width, the sensors being separated from the heater by a distance in the range of approximately one line width to approximately five line widths.

8. The apparatus of claim 1, 2, or 3 wherein the thin film heater and sensors each comprise a permalloy element.

9. The apparatus of claim 8 wherein each permalloy element has a resistance in the range of approximately 200 ohms to approximately 2000 ohms at approximately 25 degrees Centigrade.

14. The apparatus of claim 8 wherein each permalloy element has a thickness in the range of approximately 800 angstroms to approximately 1600 angstroms.

15. The apparatus of claim 1, 2, or 3 wherein the two thin film members are connected by an interconnect.

2. A flow sensor comprising:

a thin film heater encapsulated in thin film dielectric;

a pair of thin film sensors encapsulated in thin film dielectric, the sensors being disposed on opposite sides of the heater;

a semiconductor body with a depression therein;

and

the encapsulated heater and sensors forming two thin film members bridged across the depression so that at least a major portion of the heater and the sensors are out of contact with the semiconductor body, each member comprising one sensor and a portion of the heater.

10. The apparatus of claim 2 or 3 wherein the dielectric has a thickness in the range of approximately 0.8 micron to approximately 1.2 microns.

11. The apparatus of claim 2 or 3 wherein the dielectric comprises silicon nitride.

12. The apparatus of claim 2 or 3 wherein:

the semiconductor body comprises (100) silicon having a (100) plane and a [110] direction;

the heater and sensors lie in a plane substantially parallel to the (100) plane; and

the means connecting the heater and sensors to the body have a configuration oriented at a non-zero angle to the [110] direction.

13. The apparatus of claim 12 wherein the non-zero angle is substantially 45 degrees.

3. A flow sensor comprising:

a semiconductor body having a depression formed into a first surface of the body;

a thin film heater encapsulated in thin film dielectric; and

a pair of thin film sensors encapsulated in thin film dielectric, the thin film sensors being disposed on opposite sides of the heater;

the encapsulated heater and sensors forming two thin film members, the two thin film members being attached to the first surface at least at one location in order to suspend at least a major portion of the heater and sensors over the depression, each member comprising one sensor and a portion of the heater.