Cryopump

• US 4,479,360 A
• Filed: 12/06/1982
• Issued: 10/30/1984
• Est. Priority Date: 08/31/1982
• Status: Expired due to Fees

• Current Assignee: Leybold Aktiengesellschaft
• Original Assignee: Leybold-Heraeus GmbH
• Inventors: Heisig, Rolf, B/a/ chler, Werner
• Primary Examiner(s): Capossela, Ronald C.
• Application Number:
  US06/447,353
• Time in Patent Office: 694 Days
• Field of Search: 62/55.5, 62/268, 55/269, 417/901
• US Class Current: 62/55.5
• CPC Class Codes: F04B 37/08 by condensing or freezing, e.g. cryogenic pumps
• CPC Class Codes: Y10S 417/901 Cryogenic pumps

Abstract

A cryopump having two refrigerator stages operable for producing progressively lower temperatures and at least one surface between the refrigerator stages and in such thermal communication therewith as to have, during operation of the refrigerator stages, temperatures which adsorb and desorb thereon at least one gas in the cryopump, having the improvement comprising:

shield means extending over substantially all of the surface for substantially preventing the gas from circulating to the surface; and

means for maintaining the shield means at a substantially constant temperature during operation of the refrigerator stages.

Claims

1. In a cryopump having two refrigerator stages operable for producing progressively lower temperatures and at least one surface between the refrigerator stages and in such thermal communication therewith as to have, during operation of the refrigerator stages, temperatures which adsorb and desorb thereon at least one gas in the cryopump, the improvement comprising:

shield means extending over substantially all of the surface for substantially preventing the gas from circulating to the surface; and

means for maintaining the shield means at a substantially constant temperature during operation of the refrigerator stages.

2. A cryopump as in claim 1, wherein at least one of the refrigerator stages has a portion having a substantially constant temperature during operation thereof, and

wherein the means for maintaining the shield means at a substantially constant temperature comprises forming the shield means form a material of good heat conductivity at the temperature of the portion of the one refrigerator stage and means for mounting the shield means in thermal communication only with the portion thereof.

3. A cryopump as in claim 1, wherein the shield means is a shell enclosing the surface.

4. A cryopump as in claim 3, wherein the surface and shell are cylindrical.

5. A cryopump as in claim 4, wherein the shell is sectioned.

6. In a cryopump having refrigerator means operable for producing low temperatures and having a portion having a substantially constant temperature and at least one surface having temperatures which adsorb and desorb thereon at least one gas in the cryopump during operation of the refrigerator means, the improvement comprising:

a shield of a material having good heat conduction at the temperature of the portion of the refrigerator means, in thermal and supportive communication only with the portion of the refrigerator means, spacedly extending over substantially all of the surface, and spaced from other portions of the refrigerator means sufficiently to be thermally insulated therefrom and so as substantially to prevent the gas from circulating to the surface.

7. A cryopump as in claim 6, wherein the refrigerator means has successive refrigerator stages and the surface is between two stages thereof.

8. In a cryopump having refrigerator means operable for producing low temperatures and having a portion having a substantially constant temperature during operation thereof, at least one first surface operable thereby for the adsorption of at least one gas from the cryopump, and at least one second surface which is not intended for gas adsorption, the second surface which is not intended for gas absorption being in such thermal communication with the refrigerator means as to have temperatures which would adsorb and desorb at least one gas from the cryopump thereon during operation of the refrigerator means, the improvement comprising:

a shield of a material having good heat conduction at the temperature of the portion of the refrigerator means, in thermal and supportive communication only with the portion of the refrigerator means, spacedly extending over substantially all of the second surface, and spaced from other portions of the refrigerator means sufficiently to be thermally insulated therefrom and so as substantially to prevent the gas from circulating to the second surface.