Electrostatic chuck plate

• US 4,480,284 A
• Filed: 09/29/1982
• Issued: 10/30/1984
• Est. Priority Date: 02/03/1982
• Status: Expired due to Fees

• Current Assignee: Tokyo Shibaura Denki Kabushiki Kaisha (Toshiba Corporation)
• Original Assignee: Tokyo Shibaura Denki Kabushiki Kaisha (Toshiba Corporation)
• Inventors: Mori, Ichiro, Tojo, Toru, Sano, Shunichi
• Primary Examiner(s): EISENZOPF, REINHARD
• Application Number:
  US06/428,341
• Time in Patent Office: 762 Days
• Field of Search: 361/234, 361/230
• US Class Current: 361/234
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks

Abstract

An electrostatic chuck plate comprises an electrode plate made of electrically conductive material and a dielectric layer formed on one surface of the electrode plate by flame-spraying dielectric material. The surface region of the dielectric layer is impregnated with plastic material, and the surface of the dielectric layer is smooth and flat. A sample is electrostatically attracted toward the electrode plate and is thus held on the smooth and flat surface of the dielectric layer.

Claims

1. An electrostatic chuck plate for holding a sample with an electrostatic force, comprising:

an electrode made of electrically conductive material and having a flat surface; and

a dielectric layer formed on the flat surface of the electrode by flame-spraying dielectric material, said dielectric layer having a flat surface to be electrically charged to electrostatically attract a sample;

wherein at least said flat surface of said dielectric layer is impregnated with plastic material.

2. An electrostatic chuck plate according to claim 1, further comprising means for generating an electric field which extends substantially perpendicular to the flat surface of the dielectric layer.

3. An electrostatic chuck plate according to claim 1, wherein said dielectric layer is made of alumina, titanium dioxide, barium titanate, ceramics or a mixture of at least two of these materials.

4. An electrostatic chuck plate according to claim 1, wherein said plastic material contains a high-molecular material selected from the group consisting of methacryl resin, epoxy resin and fluororesin.