Scanning capacitance microscope

• US 4,481,616 A
• Filed: 09/30/1981
• Issued: 11/06/1984
• Est. Priority Date: 09/30/1981
• Status: Expired due to Term

• Current Assignee: RCA Corporation
• Original Assignee: RCA Corporation
• Inventors: Matey, James R.
• Primary Examiner(s): CARDILLO JR, RAYMOND
• Application Number:
  US06/307,021
• Time in Patent Office: 1,133 Days
• Field of Search: 369/58, 369/126, 358/342
• US Class Current: 369/53.41
• CPC Class Codes: G01B 7/28 for measuring contours or curvatures
• CPC Class Codes: G01Q 60/48 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G11B 23/0078 information structure layers using metallic or dielectric coatings
• CPC Class Codes: Y10S 977/852 for detection of specific nanostructure sample or nanostructure-related property
• CPC Class Codes: Y10S 977/866 Scanning capacitance probe

Abstract

Variations in topography and material properties of the surface layer of a body are observed in microscopic imaging using a scanning capacitance probe. The acronym SCaM identifying the process and apparatus is derived from the phrase scanning capacitance microscope. The material properties observable by SCaM are the surface-electric property representative of the complex dielectric constant of the surface material and the surface-mechanical property representative of the elastic constant of the surface material.

Claims

1. A method for determining variations in the topography and material properties of the surface layer of a body of material comprising:

(a) scanning said surface layer with a capacitance probe to generate a first signal representing capacitance variations between the surface layer and said probe;

(b) scanning a recording medium in synchronism with the scanning of the surface layer with said probe;

(c) recording said first signal on the recording medium as a second signal; and

(d) generating a visual display from said second signal from said recording medium presenting thereby capacitance variations as visually discernible variations of an image consisting of points which correlate on a one-to-one basis with points on the surface layer, the image variations manifesting features of the surface layer which cause variations in capacitance between the surface layer and the capacitance probe.

2. The method of claim 1 wherein step (d) comprises magnifying the image by a factor determined by dimensions of the rasters on the recording medium and on the surface layer.

3. The method of claim 1 in which said probe is in the form of an electrode suspended above said material by a supporting arm comprising the step of:

scanning said surface layer with said probe by moving said body layer in an x-y raster scan while holding said probe in a fixed position.

4. The method of claim 1 in which said probe is in the form of an electrode above said surface layer comprising the step of:

scanning said surface layer with said probe by rotating said body while moving said probe in a radial direction.

5. A method for determining variations in the topography and material properties of the surface layer of a disc upon which is impressed a spiral groove, comprising the steps of:

(a) rotating said disc about a vertical axis;

(b) scanning said surface layer by a capacitance probe having an electrode riding in said groove, thereby generating a scan of the disc in radius and angle to generate a capacitance signal;

(c) recording said signal as an image on photographic film by

(c1) generating an x-y raster scan of a cathode ray tube in synchronism with the radius and angle scan of said surface layer of said disc;

(c2) modulating the intensity of the cathode ray tube beam with said signal to display thereby capacitance variations as visually discernible variations of an image consisting of points which correlate on a one-to-one basis with points on the surface layer, the image variations manifesting features of the surface layer which cause variations in capacitance between the surface layer and the capacitance probe; and

(c3) photographing the image displayed on the face of the cathode ray tube.

9. The method according to claims 5, 6, 7, or 8 further comprising the step of:

before rotating said disc, coating the surface with a conformal metallic layer having a thickness great enough to prevent variations in the mechanical and electrical properties of said surface layer from affecting the capacitance probe whereby only topographical variations in said surface are determined.

6. A method for determining variations in the topography and material properties of the surface layer of a disc upon which is impressed a spiral groove, comprising the steps of:

(a) rotating said disc about a vertical axis;

(b) scanning said surface layer by a capacitance probe having an electrode riding in said groove, thereby generating a scan of the disc in radius and angle to generate a first signal;

(c) filtering said first signal with an anti-aliasing filter to provide a second signal;

(d) sampling said second signal with an analog to digital converter having a fixed sampling rate which is synchronized to said radius and angle scan of said surface layer to convert said second signal to digital form to provide digital samples of said second signal; and

(e) storing said digital samples in a computer memory, said digital samples representing capacitance variations consisting of data points which correlate on a one-to-one basis with points on the surface layer, the capacitance variations representing features of the surface layer which cause variations in capacitance between the surface layer and the probe.

7. The method of claim 6 further comprising:

analyzing said digital samples for digital image processing by fast-fourier transform spectral estimating, correlation, cross-correlation or coherence techniques.

8. The method of claim 6 further comprising the step of:

generating an image from said digital samples by scanning the computer memory in synchronism with a raster scan of a cathode ray tube and modulating the intensity of the cathode ray tube beam with a signal derived from the contents of the computer memory.

10. A method for determining variations in the electrical properties of the surface layer of a body of material comprising the steps of:

(a) scanning said surface layer with a capacitance probe to generate a first signal representing capacitance variations between said surface layer and said probe;

(b) scanning a recording medium in synchronism with the scanning of the surface layer with said probe;

(c) recording said first signal on the recording medium as a second signal;

(d) generating a first image from said second signal corresponding to a predetermined surface portion of said surface layer;

(d1) storing said first image in memory;

(e) coating said surface layer with a conformal metallic coating having a thickness in excess of the Thomas-Fermi shielding range for electrons in the material comprising the metal of said metallic coating, said coating being thin enough to prevent significant changes in the mechanical properties of said surface layer;

(f) after step (e) repeating steps (a) to (c) to generate a third signal representing capacitance variations and recording of said third signal as a fourth signal for generating a second image of said predetermined surface portion;

(g) generating said first image from memory; and

(h) comparing said first image to said second image to determine variations in electrical properties of said surface as manifested by the presence of features in the first image which are absent in the second image.

11. A scanning capacitance microscope for determining variations in the opography and material properties of the surface layer of a body of material comprising:

(a) means for scanning said surface layer with a capacitance probe to generate a first signal representing capacitance variations between the surface layer and said probe;

(b) means for scanning a recording medium in synchronism with the scanning of the surface layer with said probe;

(c) means for recording said first signal on the recording medium as a second signal; and

(d) means for generating a visual display from said second signal from said recording medium presenting thereby capacitance variations as visually discernible variations of an image consisting of points which correlate on a one-to-one basis with points on the surface layer, the image variations manifesting features of the surface layer which cause variations in capacitance between the surface layer and the capacitance probe.

12. The microscope according to claim 11 further including means for rotating said body and means for moving said probe in a radial direction over said layer.

13. The microscrope according to claim 11, further including a scan generator means for controlling the scan of said probe and for controlling the scan of said recording medium so that the recording medium is scanned in synchronism with said surface layer.

14. The microscope according to claim 13, wherein said probe is supported in a fixed position over said surface layer and said surface layer is translated in an X and Y scan under said probe.

15. The microscope according to claim 13, wherein said surface layer is fixed and said probe is translated over said surface in an X and Y scan.

16. The microscope according to claim 15, wherein said probe is forced against said surface layer with sufficient force to deform said surface.

17. A method of microscopy comprising continuously scanning the surface of a body with only one capacitance probe by providing relative movement between the surface and the probe to generate a continous signal representing the variation in capacitance between the body and the probe, and processing the signal to produce an image of the topography and material properties of the surface layer.

18. A method according to claim 17 wherein the image comprises an information pattern having a one to one correlation with features of topography and material properties of the surface layer.

19. A method according to claim 17 wherein the scanning step comprises scanning the body according to a predetermined scanning pattern.

20. Microscopy apparatus comprising means for continuously scanning the surface of a body with only one capacitance probe by providing relative movement between the surface and the probe to generate a continuous signal representing the variation in capacitance between the body and the probe, and processing the signal to produce an image of the topography and material properties of the surface layer.

21. An apparatus according to claim 20, wherein the image comprises an information pattern having a one to one correlation with features of topography and material properties of the surface layer.