Tubular transducer structures

• US 4,483,196 A
• Filed: 03/07/1983
• Issued: 11/20/1984
• Est. Priority Date: 03/07/1983
• Status: Expired due to Term

• Current Assignee: Kulite Semiconductor Products Inc
• Original Assignee: Kulite Semiconductor Products Inc
• Inventors: Kurtz, Anthony D., Nunn, Timothy A., Mallon, Joseph R. Jr.
• Primary Examiner(s): Woodiel, Donald O.
• Application Number:
  US06/472,851
• Time in Patent Office: 624 Days
• Field of Search: 73/730, 73/727, 73/726, 73/720, 73/721, 73/719, 128/675, 128/674, 128/673, 128/672, 338/4, 338/42
• US Class Current: 73/730
• CPC Class Codes: G01L 9/0002 using variations in ohmic resistance G01L9/0051 takes precedence
• CPC Class Codes: G01L 9/0052 of piezoresistive elements circuits therefor G01L9/06

Abstract

A pressure transducer employs a tubular glass structure of a "D" shaped cross section, with the arcuate section of the "D" shaped configuration being substantially thicker than the base section. A sensor array is positioned on the underside of the base section while a pressure conducting fluid is directed through the tubular member to provide deflection of the base to cause the sensor array to provide an output indicative of pressure variations in the fluid medium. The sensor array as positioned on the underside of the base is both electrically and mechanically isolated from the pressure conducting medium.

Claims

1. A pressure transducer apparatus, comprising;

a longitudinal tubular insulator member having an inlet and outlet port for enabling a pressure conducting fluid to propagate therethrough, said tubular member having at least one elongated flat surface area of a thickness substantially less than the thickness of the remaining surface area with said flat surface area adapted to deflect according to pressure variations in said medium, and a pressure sensor array positioned on said flat surface area on the side not in contact with said fluid medium wherein said longitudinal tubular member is of a "D" shaped cross section, with the arcuate portion of said "D" being substantially thicker than the base portion with said base portion being said flat surface area.

2. The pressure transducer apparatus according to claim 1, wherein said longitudinal tubular insulator member is fabricated from glass.

3. The pressure transducer according to claim 1, wherein said sensor array is positioned on the underside of said base portion near one edge.

4. The pressure transducer according to claim 3, wherein said sensor array is a picture frame array of piezoresistive sensor elements.

5. The pressure transducer according to claim 3, wherein said sensor array is a shear gage transducer fabricated from a single piece of silicon and of an X shaped configuration.

6. The pressure transducer according to claim 1, wherein said pressure conducting fluid is a saline solution.

7. The pressure transducer according to claim 1, wherein said flat surface area contains a raised boss separated from said remaining surface area by a given area of said substantially less thickness with said sensor array positioned over said given area.

8. A pressure transducer apparatus for mounting in a housing having an internal hollow with an inlet opening for receiving a pressure conducting fluid and an output opening for discharging said fluid, said transducer comprising;

a longitudinal tubular insulator member having an inlet coupled to said inlet opening and an outlet coupled to said outlet opening with said inlet and outlet communicating via the hollow of said tubular member of a "D" shaped cross section, with the arcuate portion of said "D" being thicker than the base portion of said "D", with a pressure sensor array positioned on said base portion and located on the surface thereof not in communication with said hollow.

9. The pressure transducer apparatus according to claim 8, wherein said tubular member is fabricated from glass.

10. The pressure transducer according to claim 9, wherein said glass is Pyrex.

11. The pressure transducer according to claim 8, wherein said arcuate portion of said "D" shaped member is at least five times thicker than said base portion.

12. The pressure transducer apparatus according to claim 8, wherein said sensor array is positioned relatively near the center of said base nearer one side thereof.

13. The pressure transducer apparatus according to claim 12, wherein said sensor array is a piezoresistive picture frame array.

14. The pressure transducer apparatus according to claim 12, wherein said sensor array is a shear gage transducer fabricated from a single piece of silicon and of an X shaped configuration.

15. The pressure transducer apparatus according to claim 8, further including a raised boss area located on said base portion of said tubular member and extending into said hollow, with said boss separated from the walls of said arcuate position by a predetermined area, with said sensor array positioned on the opposite side of said base portion and overlying said predetermined area.

16. The pressure transducer apparatus according to claim 15, wherein said sensor array includes at least one longitudinal piezoresistive sensor element.

17. The pressure transducer according to claim 15, wherein said boss is of a rectangular configuration.

18. The pressure transducer apparatus according to claim 8, wherein said pressure conducting fluid is a saline solution.

19. The pressure transducer according to claim 8, wherein said sensor array is glass bonded to said base portion.