Environmentally stable lithium niobate acoustic wave devices
First Claim
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1. An acoustic wave device, comprising:
- a lithium niobate substrate having a principal plane cut at an angle of zero degrees with respect to its Y crystallographic axis with propagation in the X direction;
electroacoustic transducer metallization disposed on said surface; and
a surface layer of amorphous silicon dioxide disposed on said surface and over said metallization, said layer having a thickness of substantially 0.42 wavelengths of the acoustic wave in said device.
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Abstract
Acoustic Wave Devices comprise lithium niobate substrates 6, 22 having the principal plane cut at zero degrees and 128°, respectively, with respect to the Y crystallographic axis thereof, propagating in the X direction, with amorphous silicon dioxide surface layers of 0.42 and 1.24 wavelengths, respectively.
37 Citations
2 Claims
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1. An acoustic wave device, comprising:
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a lithium niobate substrate having a principal plane cut at an angle of zero degrees with respect to its Y crystallographic axis with propagation in the X direction; electroacoustic transducer metallization disposed on said surface; and a surface layer of amorphous silicon dioxide disposed on said surface and over said metallization, said layer having a thickness of substantially 0.42 wavelengths of the acoustic wave in said device.
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2. An acoustic wave device, comprising:
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a lithium niobate substrate having a principal plane cut at at an angle of 128 degrees with respect to its Y crystallographic axis with propagation in the X direction; electroacoustic transducer metallization disposed on said surface; and a surface layer of amorphous silicon dioxide disposed on said surface and over said metallization, said layer having a thickness of substantially 1.24 wavelengths of the acoustic wave in said device.
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Specification
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Current AssigneeUnited Technologies Corporation (Raytheon Technologies Corporation d/b/a RTX)
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Original AssigneeUnited Technologies Corporation (Raytheon Technologies Corporation d/b/a RTX)
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InventorsGrudkowski, Thomas W., Meltz, Gerald, Cullen, Donald E.
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Primary Examiner(s)Miller, J. D.
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Assistant Examiner(s)Rebsch, D. L.
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Application NumberUS06/562,629Time in Patent Office337 DaysField of Search310/313 A, 310/313 C, 333/151, 333/154, 333/155, 333/191, 333/193, 333/195, 333/196US Class Current310/313.00ACPC Class CodesH03H 9/0222 of interface-acoustic, boun...
