Method for evaluating the quality of the bond between two members utilizing thermoacoustic microscopy

• US 4,484,820 A
• Filed: 05/25/1982
• Issued: 11/27/1984
• Est. Priority Date: 05/25/1982
• Status: Expired due to Fees

• Current Assignee: The Therma-Wave Incorporated (KLA Corporation)
• Original Assignee: The Therma-Wave Incorporated (KLA Corporation)
• Inventors: Rosencwaig, Allan
• Primary Examiner(s): Yasich, Daniel M.
• Application Number:
  US06/381,891
• Time in Patent Office: 917 Days
• Field of Search: 374/117, 374/57, 374/6, 73/643, 73/606, 73/588, 73/582, 73/659, 73/643, 356/354
• US Class Current: 374/6
• CPC Class Codes: F02G 3/00 Combustion-product positive-displacement engine plants
• CPC Class Codes: G01N 21/1702 with opto-acoustic detection, e.g. for gases or analysing solids
• CPC Class Codes: G01N 21/8422 Investigating thin films, e.g. matrix isolation method
• CPC Class Codes: G01N 2291/02827 Elastic parameters, strength or force
• CPC Class Codes: G01N 2291/2697 Wafer or (micro)electronic parts
• CPC Class Codes: G01N 29/0681 by acoustic microscopy, e.g. scanning acoustic microscopy
• CPC Class Codes: G01N 29/348 with frequency characteristics, e.g. single frequency signals, chirp signals measuring frequency of mechanical vibrations or acoustic waves in general G01H1/06, G01H3/04; measuring frequency or analysing frequency spectra G01R23/00
• CPC Class Codes: G10K 15/046 using optical excitation, e.g. laser bundle

Abstract

The subject invention relates to a method of evaluating the quality of the bond achieved between two members utilizing thermoacoustic microscopy. More particularly, thermoacoustic microscopy is used to detect and/or image the plate-mode resonant signature of bonded members to determine the quality of the bond therebetween. The method is particularly suited for analyzing the integrity of a bond between an integrated circuit die and a substrate. The subject method takes advantage of the fact that the plate-mode signature of a securely bonded die and substrate combination and a poorly bonded combination will be different. Accordingly, by detecting and/or imaging the plate-mode resonant signature of the sample the integrity of the bond can be assessed. Two techniques for carrying out the subject method are disclosed.

Claims

1. A method for evaluating the quality of the bond achieved between a combination of a first and second member comprising the steps of:

causing a periodic localized heating in at least one microscopic spot in said first member to produce thermal waves which in turn give rise to acoustic waves of a longer wavelength that propagate through said combination with the frequency of said periodic heating causing said combination to resonate;

detecting the acoustic waves produced in said combination and generating signals therefrom;

processing said signals to obtain a plate-mode resonant signature of said first and second member combination; and

comparing said obtained plate-mode resonant signature to a predetermined plate-mode resonant signature associated with a similar combination where the quality of the bond is known whereby the quality of the bond between said members can be evaluated.

2. The method as recited in claim 1 further including the step of scanning the first member, with said localized heated spot, in a two dimensional array of microscopic spots and processing said signals as a function of the position of said localized heating to generate a two dimensional image of the plate-mode resonant signature of said combination.

3. The method as recited in claim 1 further including the step of varying the frequency of said periodic localized heating while maintaining said heating at a single spot in order to generate a plurality of plate-mode resonances.

4. The method as recited in claim 1 wherein the source of said localized heating is an intensity modulated beam of energy.

5. The method as recited in claim 4 wherein said beam of energy is defined by electromagnetic radiation.

6. The method as recited in claim 5 wherein said electromagnetic radiation is defined by light.

7. The method as recited in claim 6 wherein said light is generated from a laser and is coherent.

8. The method as recited in claim 4 wherein said beam of energy is defined by a stream of particles.

9. The method as recited in claim 8 wherein the particles in said beam are electrons.

10. The method as recited in claim 1 wherein said source of localized heating is defined by an electrical resistance.

11. The method as recited in claim 1 wherein said detector is an ultrasonic transducer.

12. The method as recited in claim 11 wherein said ultrasonic transducer is a piezoelectric detector.

13. The method as recited in claim 1 wherein said detector is a laser probe.

14. The method as recited in claim 1 wherein said detector is a laser interferometer.

15. A method for evaluating the quality of the bond achieved between a combination of a first and second member comprising the steps of:

causing a periodic localized heating at a microscopic spot in said first member to produce thermal waves which in turn give rise to acoustic waves of a longer wavelength that propagate through said combination and with the frequency of said periodic heating being selected to cause said combination to resonate and exhibit a plate-mode signature;

detecting the acoustic waves produced in said combination and generating signals therefrom;

scanning said first member with said localized heating in a two-dimensional array of microscopic spots;

processing said detected signals as a function of the position of said heated spot to generate a two-dimensional image of the plate-mode resonant signature of said combination; and

comparing said generated image of said plate-mode resonant signature to a predetermined plate-mode resonant signature associated with a similar combination where the quality of the bond is known whereby the quality of the bond between said members can be evaluated.

16. The method as recited in claim 15 wherein the source of such localized heating is an intensity modulated beam of energy.

17. The method as recited in claim 16 wherein said beam of energy is defined by electromagnetic radiation.

18. The method as recited in claim 17 wherein said electromagnetic radiation is defined by light.

19. The method as recited in claim 18 wherein said light is generated from a laser and is coherent.

20. The method as recited in claim 16 wherein said beam of energy is defined by a stream of particles.

21. The method as recited in claim 20 wherein the particles in said beam are electrons.

22. The method as recited in claim 15 wherein said source of localized heating is defined by an electrical resistance.

23. The method as recited in claim 15 wherein said detector is an ultrasonic transducer.

24. The method as recited in claim 23 wherein said ultrasonic transducer is a piezoelectric detector.

25. The method as recited in claim 15 wherein said detector is a laser probe.

26. The method as recited in claim 15 wherein said detector is a laser interferometer.

27. A method for evaluating the quality of the bond achieved between a combination of a first and second member comprising the steps of:

causing a periodic localized heating at a microscopic spot in said first member to produce thermal waves which in turn give rise to acoustic waves of a longer wavelength that propagate through said combination;

detecting the acoustic waves produced in the combination and generating signals therefrom;

varying the frequency of the periodic heating while maintaining said heating at a single point to generate a plurality of plate-mode resonances in said combination; and

comparing the detected signals to a set of predetermined signals associated with a similar combination where the quality of the bond is known whereby the quality of the bond between said members can be evaluated.

28. The method as recited in claim 27 wherein the source of said localized heating is an intensity modulated beam of energy.

29. The method as recited in claim 28 wherein said beam of energy is defined by electromagnetic radiation.

30. The method as recited in claim 29 wherein said electromagnetic radiation is defined by light.

31. The method as recited in claim 30 wherein said light is generated from a laser and is coherent.

32. The method as recited in claim 28 wherein said beam of energy is defined by a stream of particles.

33. The method as recited in claim 32 wherein the particles in said beam are electrons.

34. The method as recited in claim 27 wherein said source of heating is defined by an electrical resistance.

35. The method as recited in claim 27 wherein said detector is an ultrasonic transducer.

36. The method as recited in claim 35 wherein said ultrasonic transducer is a piezoelectric detector.

37. The method as recited in claim 27 wherein said detector is a laser probe.

38. The method as recited in claim 27 wherein said detector is a laser interferometer.

39. A method for evaluating the quality of the bond achieved between a combination of an integrated circuit die and a substrate comprising the steps of:

causing a periodic localized heating at a microscopic spot in said die to produce thermal waves which in turn give rise to acoustic waves of a longer wavelength that propagate through said combination;

detecting the acoustic waves produced in said combination and generating signals therefrom;

varying the frequency of said periodic heating while maintaining said heating at a single spot to generate a plurality of plate-mode resonances in said combination; and

comparing the detected signals to a set of predetermined signals associated with a similar combination where the quality of the bond is known whereby the quality of the bond between said die and substrate can be evaluated.

40. The method as recited in claim 39 wherein the source of said localized heating is an intensity modulated beam of energy.

41. The method as recited in claim 40 wherein said beam of energy is defined by electromagnetic radiation.

42. The method as recited in claim 41 wherein said electromagnetic radiation is defined by light.

43. The method as recited in claim 42 wherein said light is generated from a laser and is coherent.

44. The method as recited in claim 40 wherein said beam of energy is defined by a stream of particles.

45. The method as recited in claim 44 wherein the particles in said beam are electrons.

46. The method as recited in claim 39 wherein said source of heating is defined by an electrical resistance.

47. The method as recited in claim 39 wherein said detector is an ultrasonic transducer.

48. The method as recited in claim 47 wherein said ultrasonic transducer is a piezoelectric detector.

49. The method as recited in claim 39 wherein said detector is a laser probe.

50. The method as recited in claim 39 wherein said detector is a laser interferometer.

51. An apparatus for evaluating the quality of the bond achieved between a combination of a first and second member comprising:

means generating a periodic localized heating in at least one microscopic spot in said first member to produce thermal waves which in turn gives rise to acoustic waves of longer wavelength which propagate through said combination in a manner to cause said combination to resonate;

means for detecting the acoustic waves generated in said combination;

means for processing the detected acoustic waves to obtain a plate-mode resonant signature; and

means for comparing the obtained plate-mode resonant signature to a predetermined plate-mode resonant signature associated with a similar combination where the quality of the bond is known, whereby the quality of the bond between the members can be evaluated.

52. An apparatus as recited in claim 51 wherein said heating means further includes a means for varying the frequency of the periodic heating.

53. An apparatus as recited in claim 52 wherein said means for varying the frequency is a modulator.

54. An apparatus as recited in claim 51 wherein said means for generating localized heating is defined by an intensity modulated beam of energy.

55. An apparatus as recited in claim 51 further comprising:

means for scanning the first member with said localized heated spot in a two-dimensional array of microscopic spots; and

means for processing said signals as a function of the position of said localized heating to generate a two-dimensional image of the plate-mode resonant signature of said combination.

56. An apparatus as recited in claim 51 wherein said means for detecting acoustic waves generated in said combination is defined by a piezoelectric transducer.

57. An apparatus as recited in claim 51 wherein said means for detecting the acoustic waves generated in said combination is defined by a laser probe.