Method of depositing a carbon film on a substrate and products obtained thereby
First Claim
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1. A method of forming a diamond-like carbon film on a substrate comprising:
- (a) providing a source of carbon ions;
(b) directing carbon ions to a substrate under conditions producing a diamond-like carbon film which may contain other forms of carbon;
(c) providing a source of second ions from a non-hydrocarbon gas in greater than an impurity amount capable of preferentially removing said other forms of carbon by chemical sputtering; and
(d) directing said second ions to said substrate under conditions effective to promote the preferential chemical sputtering of said other forms of carbon in said film.
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Abstract
There is disclosed a method for depositing a diamond or diamond-like carbon film on at least one substrate employing a hydrocarbon gas and at least one gas which preferentially removes by chemical sputtering other forms of carbon, especially graphite from said film to thereby obtain useful carbon film coated products.
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23 Claims
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1. A method of forming a diamond-like carbon film on a substrate comprising:
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(a) providing a source of carbon ions; (b) directing carbon ions to a substrate under conditions producing a diamond-like carbon film which may contain other forms of carbon; (c) providing a source of second ions from a non-hydrocarbon gas in greater than an impurity amount capable of preferentially removing said other forms of carbon by chemical sputtering; and (d) directing said second ions to said substrate under conditions effective to promote the preferential chemical sputtering of said other forms of carbon in said film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification