Semiconductor non-volatile memory device

• US 4,491,859 A
• Filed: 08/25/1983
• Issued: 01/01/1985
• Est. Priority Date: 06/18/1979
• Status: Expired due to Term

• Current Assignee: Fujitsu Limited
• Original Assignee: Fujitsu Limited
• Inventors: Ito, Takashi, Hijiya, Shinpei
• Primary Examiner(s): Munson, Gene M.
• Application Number:
  US06/526,219
• Time in Patent Office: 495 Days
• Field of Search: 357/4, 357/23 VT, 357/41, 357/54, 357/23 TF, 365/185
• US Class Current: 257/318
• CPC Class Codes: G11C 16/0433 comprising cells containing a single floating gate transistor and one or more separate select transistors
• CPC Class Codes: H01L 27/12 the substrate being other than a semiconductor body, e.g. an insulating body
• CPC Class Codes: H01L 29/78618 characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure silicide contacts, electrodes in general H01L29/458
• CPC Class Codes: H01L 29/78624 the source and the drain regions being asymmetrical
• CPC Class Codes: H01L 29/7886 Hot carrier produced by avalanche breakdown of a PN junction, e.g. FAMOS
• CPC Class Codes: H10B 69/00 Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices

Abstract

A semiconductor non-volatile memory device comprising: (a) memory transistor which has: a first source, drain, and channel regions; a first insulation film formed above the first channel region; a floating gate formed above the first insulation film; and a first impurity region which is formed contiguous with the first drain region adjacent to an end of the floating gate, and which has a conductivity type opposite to that of the first drain region; (b) a switching transistor which has: second source, drain, and channel regions, a second insulation film formed above the second channel region, and a gate electrode formed above the second insulation film; (c) wiring means which connects the first impurity region of the memory transistor to the second drain region of the switching transistor. When information is being written, the switching transistor keeps the first impurity region in a ground state, and when information is being read, the switching transistor keeps the impurity region in an electrically floating state.

Claims

1. A non-volatile memory cell comprising;

a memory transistor which includes a floating gate into which information in the form of stored charge can be read, written and erased, and a source, a drain and a channel beneath said floating gate and between said source and said drain, said channel having conductivity type opposite to that of said source and drain;

a first impurity region located in contact with said drain and electrically separated from said channel by said drain, said first impurity region having the same conductivity type as that of said channel;

one end of said floating gate being located over said drain at a position near the boundary between said drain and said first impurity region so that hot carriers can reach said floating gate from said boundary for the writing and erasing of said information;

avalanche means connected to said drain and to said first impurity region, for causing avalanche breakdown of the junction between said drain and first impurity region to provide said hot carriers for said writing and erasing of said information; and

control means for controlling said avalanche means and the potentials of said source, drain and floating gate so that none of said hot carriers are provided when said information is being read;

wherein said avalanche breakdown is caused for at least one of said writing and erasing of said information into said memory cell.

2. The cell of claim 1, wherein said device may be operated to read, write and erase said information with signals of less than 5 volts.

3. The cell of claim 1, wherein said avalanche means comprises a voltage supply connected to said drain.

4. The cell of claim 1, wherein said avalanche means comprises a second impurity region of the same conductivity type as said drain located in contact with said first impurity region, said first impurity region separating said second impurity region from said drain.

5. The device of claim 1, 3 or 4, said control means comprising an insulated control electrode formed over said floating gate for controlling said writing and erasing of said information.

6. The device of claim 3, said avalanche means comprising a switching transistor the drain of which comprises said first impurity region, wherein said first impurity region is placed in a non-floating state for said writing and erasing of information, and in a floating state for said reading of information.

7. The device of claim 1 or 4, wherein a portion of the boundary between said drain and said first impurity region is located under, or aligned with an edge of, said floating gate.

8. A semiconductor non-volatile memory device comprising:

a memory transistor which has

a first source region, a first drain region and a first channel region between said first source and drain regions, said first channel region being of the opposite conductivity type from that of said first source and drain regions,

a first insulating film on said first channel region, and

a floating gate on said first insulating film;

a first impurity region contacting said first drain region in the vicinity of a portion of said floating gate so that energetic carriers can be provided to said floating gate, said first impurity region having electric conductivity type opposite to that of said first drain region, and said first impurity region being separated from said first channel region by said first drain region;

a switching transistor which has

a second source region, a second drain region and a second channel region between said second source and drain regions, said second channel region having opposite conductivity type from that of said second source and drain regions,

a second insulating film on said second channel region, and

a gate electrode on said second insulating film;

wiring means connecting said first impurity region to said second drain region; and

control means for controlling said switching transistor to keep said first impurity region in a grounded state when information is being written and erased and for controlling said switching transistor to keep said first impurity region in an electrically floating state when said information is being read, so that hot carriers are provided only when said information is being written and erased.

9. The device of claim 8, comprising a second impurity region of the same conductivity type as said first drain region located between said first impurity region and said wiring means, said second impurity region separating said wiring means from said first impurity region.

10. The device of claim 8 or 9, wherein said first source region extends beneath said floating gate to control the potential of said floating gate according to the capacitance therebetween and the potential that is applied to said first source region.

11. The device of claim 8 or 9, further comprising a third insulating film on said floating gate and a control gate on said third insulating film, wherein the potential of said floating gate can be controlled by said control gate according to the capacitance between said third insulating film and said floating gate and the potential of said control gate.

12. The device of claim 8 or 9, wherein said first and second source, drain and channel regions are formed in a semiconductor substrate, and said first and second impurity regions are formed within said first drain and first impurity regions, respectively.

13. The device of claim 8 or 9, wherein said first and second source, drain and channel regions are formed on an insulating substrate.

14. The device of claim 8 or 9, said first channel region having the same conductivity type as said second channel region.