Separable high vacuum valve
First Claim
1. Apparatus permitting separation or assembly of two vacuum chambers without breaking the vacuum on either chamber, said apparatus comprising:
- a first valve permanently attachable to a first vacuum chamber to seal an opening therein;
a second valve permanently attachable to a second vacuum chamber to seal an opening therein;
a valve housing extending around said first and second valves;
means for sealing said valve housing against said vacuum chambers to form a valve lock chamber between said first and second vacuum chambers;
actuating means for opening and closing said first and second valves, said actuating means being operable while said valve lock chamber is attached to said vacuum chambers and while said valve lock chamber is evacuated; and
means for connecting a vacuum pump to said valve lock chamber;
whereby the first and second chambers are separable by closing said first and second valves and venting said valve lock chamber to the atmosphere or said first and second vacuum chambers may be assembled by connecting said vacuum chambers to said valve lock chamber, evacuating said valve lock chamber and opening said first and second valves.
1 Assignment
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Accused Products
Abstract
A valve structure permitting two vacuum chambers (16, 20) to be separted or joined without breaking the vacuum in either. The structure includes first and second valves (10, 12) positioned at openings in the vacuum chambers, a valve housing 30 surrounding the valves and able to be sealed to form a valve lock chamber (32), and a pair of valve actuators (34, 36). Each valve includes a pair of plates movable together to an intermediate position over the opening, and then movable away from each other in response to further actuator movement, to seal one of the plates over the opening. In one disclosed embodiment the plates are moved apart by a pair of parallel pivot links, and in another embodiment a pair of balls is used to effect the required sealing movement.
52 Citations
10 Claims
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1. Apparatus permitting separation or assembly of two vacuum chambers without breaking the vacuum on either chamber, said apparatus comprising:
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a first valve permanently attachable to a first vacuum chamber to seal an opening therein; a second valve permanently attachable to a second vacuum chamber to seal an opening therein; a valve housing extending around said first and second valves; means for sealing said valve housing against said vacuum chambers to form a valve lock chamber between said first and second vacuum chambers; actuating means for opening and closing said first and second valves, said actuating means being operable while said valve lock chamber is attached to said vacuum chambers and while said valve lock chamber is evacuated; and means for connecting a vacuum pump to said valve lock chamber; whereby the first and second chambers are separable by closing said first and second valves and venting said valve lock chamber to the atmosphere or said first and second vacuum chambers may be assembled by connecting said vacuum chambers to said valve lock chamber, evacuating said valve lock chamber and opening said first and second valves. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification