Method and apparatus for exposing photosensitive material
First Claim
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1. An apparatus for simultaneously exposing a photosensitive material to at least three coherent beams of exposing radiation which comprisesa laser;
- means for dividing the wavefront of said beam emanating from said laser into equal parts;
at least three mirrors reflecting said divided beams, the number of said mirrors corresponding to the number of parts of said beam, and whereinsaid mirrors are located symmetrically around an axis perpendicular to the plane of the surface of said photosensitive material.
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Abstract
Exposure patterns are formed in photosensitive material by multiple beam laser interferometry by a method which involves exposing said photosensitive material simultaneously to at least three coherent beams of exposing radiation wherein the sources of said beams are arranged substantially symmetrically around an axis perpendicular to the plane of said photosensitive material. Preferably, surface relief patterns are formed by developing said exposed material. Apparatus for providing such multiple coherent beams is also disclosed.
97 Citations
16 Claims
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1. An apparatus for simultaneously exposing a photosensitive material to at least three coherent beams of exposing radiation which comprises
a laser; -
means for dividing the wavefront of said beam emanating from said laser into equal parts;
at least three mirrors reflecting said divided beams, the number of said mirrors corresponding to the number of parts of said beam, and whereinsaid mirrors are located symmetrically around an axis perpendicular to the plane of the surface of said photosensitive material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An apparatus for simultaneously exposing a photosensitive material to at least three coherent beams of exposing radiation which comprises
a laser; -
means for dividing the amplitude of the beam emanating from said laser into at least three equal parts; separately expanding each of said divided beams by expansion lenses to impinge upon said photosensitive material;
whereby said expansion lenses are arranged symmetrically around an axis perpendicular to the plane of the surface of said photosensitive material. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification