Virtual addressing for E-beam lithography

• US 4,498,010 A
• Filed: 05/05/1983
• Issued: 02/05/1985
• Est. Priority Date: 05/05/1983
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: The Perkin-Elmer Corporation (Thermo Fisher Scientific Incorporated)
• Inventors: Carroll, Allen M., Graves, Richard E., Lyons, Steven A., Biechler, Charles S.
• Primary Examiner(s): Smith, Alfred E.
• Assistant Examiner(s): Berman, Jack I.
• Application Number:
  US06/491,678
• Time in Patent Office: 642 Days
• Field of Search: 250/492.2
• US Class Current: 250/492.2
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: H01J 2237/30488 Raster scan
• CPC Class Codes: H01J 2237/30494 Vector scan
• CPC Class Codes: H01J 37/3174 Particle-beam lithography, e.g. electron beam lithography

Abstract

A technique performed in a fixed address particle beam lithographic system where the writing is performed in the normal manner for writing a pattern, for example, a stripe on a resist having a selected feature width except that an additional row of alternate pixels is written either before or after the selected feature is written. The alternate pixels, when the resist is developed, will provide a feature width of approximately 1/2 a pixel wider than the selected feature width due to blurring of the latent image caused by scattering of the particle beam within the resist. Thus, the resolution of selectable feature widths is enhanced with little or no loss of throughput. The same technique can also be utilized to lengthen a feature by 1/2 a pixel width. The technique is disclosed primarily in a raster scan machine but also disclosed is the technique in a vector scan machine. Also disclosed is a flow chart showing the invention used while preparing the data to be written by the machine.

Claims

1. In the fabrication of integrated circuits in a particle beam apparatus, the steps in the process comprising,

forming a particle beam of the desired diameter thus defining the width of a pixel,

providing a resist material to be irradiated by said beam on a substrate,

forming pixels by directing said beam onto said resist material,

controlling said beam as it forms said pixels to form a plurality of adjacent lines of pixels which lines define a feature of a predetermined length and width,

controlling said beam as it forms said area to form pixels adjacent said feature to change said feature by approximately 1/2 a pixel width when said resist material is developed, and finally,

developing said resist material.

2. The process as claimed in claim 1 wherein said beam is further controlled to form gaps between said pixels which form said lines, and further controlling said beam so that said pixels which change said features are adjacent said pixels which form said feature.

3. The process as claimed in claim 1 wherein the control of said beam to form the pixels which change the feature is such that the pixels and gaps alternate in a line adjacent said lines which form said feature.

4. The process as claimed in claim 1 wherein scanning said resist is scanned in one direction by said beam, and

wherein said resist material and substrate are moved in a direction at right angles to the scanning direction of said beam,

the movement of said resist material and substrate in a direction at right angles to said beam scanning direction is synchronized with the movement of said beam.

6. The process as claimed in claim 1 wherein the blanking of said beam adjacent said features is done alternately to provide a row of alternate pixels adjacent said features.

7. The process as claimed in claim 2 wherein said alternate pixels are located before said features have been defined.

8. The process as claimed in claim 3 wherein said alternate pixels are located after said features have been defined.

9. The process as claimed in claim 4 wherein said alternate pixels widen said feature.

5. In the fabrication of integrated circuits in a particle beam apparatus, the steps in the process comprising,

forming a particle beam of the desired diameter thus defining a pixel,

providing a workpiece to be irradiated by said beam on a support with said beam forming pixels on said workpiece,

scanning said workpiece in one direction by said beam,

moving said workpiece in a direction at right angles to the scanning direction of said beam,

the movement of said workpiece in a direction at right angles to said beam scanning direction being synchronized with the movement of said beam,

blanking and unblanking said beam as it scans said workpiece to form lines of pixels and gaps therebetween to define features on said workpiece,

blanking said beam adjacent said features to change said features by approximately 1/2 a pixel width when said workpiece is finally processed, and finally,

processing said workpiece.

10. The process as claimed in claim 5 wherein said alternate pixels lengthen said features.

11. A method of defining a pattern on a resist material by electron beam technology, comprising;

forming a desired pattern comprising a main pattern and an enlargement thereof on a grid of a computer aided design machine,

said main pattern and enlargement together being larger in one or more directions on said grid by approximately 1/2 a grid unit,

transferring and transposing said main pattern and enlargement on a bit map as data with alternate bits corresponding to the 1/2 machine unit along the edges of the main pattern thereby defining said enlargement,

transferring said bit map data to an electron beam machine,

controlling said electron beam of said electron beam machine so as to expose said resist material in said electron beam machine according to the bit map data thereby defining the main pattern with alternate exposed pixels adjacent said main pattern where latter form said enlargement, and

developing said resist material to form a main pattern on said resist enlarged by approximately 1/2 a pixel width.