Carrier for cleaning and etching wafers

• US 4,500,080 A
• Filed: 08/13/1982
• Issued: 02/19/1985
• Est. Priority Date: 03/15/1982
• Status: Expired due to Fees

• Current Assignee: Seiichiro Aigo
• Original Assignee: Seiichiro Aigo
• Inventors: Aigo, Seiichiro
• Primary Examiner(s): Watson, Robert C.
• Application Number:
  US06/407,732
• Time in Patent Office: 921 Days
• Field of Search: 235/380, 364/468, 364/478, 198/350, 198/349, 198/341, 414/134, 414/136, 269/55, 269/56, 269/903, 269/290
• US Class Current: 269/56
• CPC Class Codes: C23F 1/08 Apparatus, e.g. for photomechanical printing surfaces photo- mechanical reproduction G03F

Abstract

A carrier supports a single lot of prescribed sheets of semiconductor wafers so as to transfer the semiconductor wafers from one processing step to another processing step in their cleaning and etching processing. The carrier, or a container for the carrier, includes an information member holder and an information member detachably supported by the holder. An information member includes a semiconductor chip which constitutes a microprocessor and memory. The above carrier can bring about numerous merits which include:

(1) Each processing or treatment apparatus is operated in accordance with instructions given by the information member and instruction errors can be effectively avoided;

(2) The completion of each processing or treatment step and other information pertaining the step are all stored in the memory, thereby facilitating correct collation; and

(3) The information member may be formed into an information card, which is small in size and extremely convenient for handling.

Claims

1. In a carrier for supporting a single lot of prescribed sheets of semiconductor wafers so as to transfer the single lot of prescribed sheets of semiconductor wafers from one processing step to another processing step in their cleaning and etching processing, in combination with equipment for effecting the steps, the improvement comprises said carrier having an information member holder and an information member detachably supported by said holder, and the informatin member includes a semiconductor chip which constitutes a microprocessor and reading and writing memory, said holder being formed on said carrier as an integral part thereof and being shaped in the form of a pocket for said information member, and an input/output control unit connected to said equipment for effecting the steps, which unit receives said information member for controlling said equipment and storing information about the steps.

2. The carrier set forth in claim 1, wherein the body of said information member and said carrier and holder are made of a synthetic resin.

3. The carrier set forth in claim 1, wherein said information member is an information card.

4. The carrier set forth in claim 1, wherein said information member is of a plate-like form.

5. The carrier set forth in claim 1, wherein said information member is of a block-like form.