Method for forming tin oxide coating
First Claim
1. In a method for forming a fluorine-containing tin oxide coating on the surface of a substrate selected from the group consisting of glass, ceramics and metals which comprises contacting the heated surface of the substrate with a mixed vapor of a tin compound and a doping agent composed of a fluorine-containing compound to oxidize and decompose the mixed vapor thermally and deposit fluorine-containing tin oxide thereon;
- the improvement wherein monobutyltin trichloride is used as the tin compound, and a fluorine compound of the following formula
space="preserve" listing-type="equation">XCHF.sub.2wherein X represents a fluorine atom, a chlorine atom, or a hydrocarbon group consisting only of carbon and hydrogen atoms, is used as the doping agent.
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Abstract
A method for forming a fluorine-containing tin oxide coating on the surface of a substrate which comprises contacting the heated surface of the substrate with a vapor of monobutyltin trichloride or a mixed vapor of monobutyltin trichloride and a doping agent composed of a fluorine-containing compound of the following formula
XCHF.sub.2
wherein X represents a fluorine atom, a chlorine atom, or a hydrocarbon group consisting only of carbon and hydrogen atoms,
to oxidize and decompose the vapor or the mixed vapor thermally and deposit tin oxide or fluorine-containing tin oxide respectively thereon.
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Citations
4 Claims
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1. In a method for forming a fluorine-containing tin oxide coating on the surface of a substrate selected from the group consisting of glass, ceramics and metals which comprises contacting the heated surface of the substrate with a mixed vapor of a tin compound and a doping agent composed of a fluorine-containing compound to oxidize and decompose the mixed vapor thermally and deposit fluorine-containing tin oxide thereon;
- the improvement wherein monobutyltin trichloride is used as the tin compound, and a fluorine compound of the following formula
space="preserve" listing-type="equation">XCHF.sub.2wherein X represents a fluorine atom, a chlorine atom, or a hydrocarbon group consisting only of carbon and hydrogen atoms, is used as the doping agent. - View Dependent Claims (2, 3, 4)
- the improvement wherein monobutyltin trichloride is used as the tin compound, and a fluorine compound of the following formula
Specification