Capacitive humidity sensor and method for the manufacture of same
First Claim
1. Capacitive humidity sensor, which comprisesa substrate made, e.g., of glass,at least one first and one second bottom electrode arranged close to each other on the substrate,an active layer, which fills the area between the first and the second bottom electrode on the substrate and extends to above the top face of the second electrode,a plurality of conductive, beam-shaped structures placed side by side, connected to the first electrode, and having an upwardly widening cross-section, said structures limiting portions of the active layer between themselves from two sides such that a narrow slot is formed between the top faces of said structures.
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Abstract
The present publication describes a capacitive humidity sensor and a method for the manufacture of same. The sensor comprises a substrate (1), first (5) and second bottom electrodes (4), which have been fitted close to each other on the substrate (1), an active layer (7), which fills the area between the first (5) and the second bottom electrodes (4) on the substrate (1) and extends to above the top face of the second electrode (4). According to the invention, the sensor further consists of structures (6) connected to the top face of the first electrode (5), made of a conductive material, and being beam-shaped with an upwardly widening section and being placed side by side, the said structures (6) limiting portions (7) of the active layer between themselves from two sides, and a narrow slot (26) being provided between the top faces of the said structures. Owing to its construction, the sensor is not sensitive to touching.
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Citations
6 Claims
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1. Capacitive humidity sensor, which comprises
a substrate made, e.g., of glass, at least one first and one second bottom electrode arranged close to each other on the substrate, an active layer, which fills the area between the first and the second bottom electrode on the substrate and extends to above the top face of the second electrode, a plurality of conductive, beam-shaped structures placed side by side, connected to the first electrode, and having an upwardly widening cross-section, said structures limiting portions of the active layer between themselves from two sides such that a narrow slot is formed between the top faces of said structures.
Specification