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Electrostatic chuck

  • US 4,502,094 A
  • Filed: 09/10/1982
  • Issued: 02/26/1985
  • Est. Priority Date: 09/14/1981
  • Status: Expired due to Term
First Claim
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1. An electrostatic chuck for holding a semiconductor wafer in a fixed plane relative to said chuck, which chuck comprises an electrically conductive member separated from said fixed plane by a layer of dielectric material, means for electrically contacting the wafer, and means for supporting the wafer in said plane, including thermally conductive portions for contacting the wafer, the electrically conductive member comprising parts which extend laterally between said thermally conductive portions, and the dielectric layer extending at least on said parts.

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