Laser beam plasma pinch X-ray system

• US 4,504,964 A
• Filed: 09/20/1982
• Issued: 03/12/1985
• Est. Priority Date: 09/20/1982
• Status: Expired due to Term

• Current Assignee: Axcelis Technologies Incorporated
• Original Assignee: Eaton Corp. (Wisconsin) (Eaton Corporation PLC.)
• Inventors: Schutten, Herman P., Spellman, Gordon B., Cartz, Louis, Weiss, Arnold, Jaskolski, Stanley V., Wackman, deceased, Peter H.
• Primary Examiner(s): Smith, Alfred E.
• Assistant Examiner(s): NOT, DEFINED
• Application Number:
  US06/420,557
• Time in Patent Office: 904 Days
• Field of Search: 378/119, 378/122, 378/123, 378/34, 313/231.61, 356/313, 356/314, 356/316, 356/318, 73/28
• US Class Current: 378/119
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: G03F 7/70033 by plasma extreme ultraviolet [EUV] sources
• CPC Class Codes: G21B 1/23 Optical systems, e.g. for irradiating targets, for heating plasma or for plasma diagnostics
• CPC Class Codes: H05G 2/001 X-ray radiation generated from plasma plasma for generation of electrons to be accelerated towards an anode H01J35/00
• CPC Class Codes: Y02E 30/10 Nuclear fusion reactors

Abstract

A system is provided for producing plasma pinch X-rays usable in X-ray lithography. Ionized heated plasma vapor is repeatably generated directly from solid material by impingement of a plurality of circumferentially spaced laser beams to generate an annulus of plasma. X-rays are generated by passing high current through the annular plasma in an axial gap between the solid material target electrode and another electrode, causing magnetic field radial inward plasma pinching to a central constricted area further heating the plasma and emitting X-rays. A central axially directed laser may further heat the plasma in the pinched area.

Claims

1. A method for producing X-rays comprising:

generating plasma directly from solid material by laser beam impingement; and

generating X-rays by passing high current rectilinearly axially through said plasma causing radially inward magnetic field plasma pinching perpendicularly to the rectilinear axial current flow, the X-ray emitting plasma pinched region being at a different location than and spaced radially inwardly of the laser beam impingement location, said laser beam being directed in an axial path parallel to or colinear with the current axis.

2. A method for producing X-rays comprising:

repeatably generating plasma in an annulus directly from solid material by laser beam impingements; and

generating X-rays by passing high current through said plasma causing magnetic field plasma pinching.

3. The invention according to claim 2 comprising directing a plurality of circumferentially spaced laser beams axially on a solid target electrode, and axially passing high current through said plasma across an axial gap between said target electrode and another electrode to cause radial inward magnetic field pinching of said plasma.

4. The invention according to claim 3 comprising directing said laser beams through a circumferential array of axial passages in said other electrode.

5. The invention according to claim 4 further comprising directing an additional laser beam through a central axial passage in said other electrode to impinge on the radially inwardly pinched plasma in the gap between said electrodes and further heat said pinched plasma.

6. The invention according to claim 4 comprising communicating said X-rays axially from said gap.

7. The invention according to claim 6 comprising communicating said X-rays through an axial passage in said target electrode.

8. The invention according to claim 6 comprising communicating said X-rays back through an axial passage in said other electrode in the opposite direction of said laser beams.

9. A method for producing X-rays usable for fine line lithography, comprising:

repeatably generating plasma in an annulus directly from solid material by laser beam impingement; and

generating X-rays by passing high current axially through said plasma causing radial inward magnetic field pinching of said plasma annulus.

10. The invention according to claim 9 comprising communicating said X-rays axially from said pinched plasma and placing a masked semiconductor substrate normal to said axis for impingement by said X-rays.

11. Apparatus for producing X-rays comprising:

means for generating plasma directly from solid material by laser beam impingement along a plurality of axially extending laser beam paths impinging said solid material at a plurality of radially spaced locations; and

means for generating X-rays by passing high current through said plasma between axially spaced electrodes causing radially inward magnetic field plasma pinching, the X-ray emitting plasma pinched region being at a different location than and spaced radially inwardly of the laser beam impingment location.

12. Apparatus for producing X-rays comprising:

means for repeatably generating plasma in an annulus directly from solid material by laser beam impingement; and

means for generating X-rays by passing high current through said plasma causing magnetic field plasma pinching.

13. The invention according to claim 12 comprising a solid target electrode, and another electrode spaced from said target electrode by an axial gap, said other electrode having a plurality of circumferentially spaced axial passages therethrough, and means for directing a plurality of circumferentially spaced laser beams axially through respective said circumferential array of axial passages in said other electrode such that said circumferential array of laser beams impinge said target electrode in an annular pattern to generate said plasma, and means for discharging a high current axially between said electrodes through said annular plasma in said gap to cause radial inward magnetic field pinching of said plasma to a central constricted area.

14. The invention according to claim 13 wherein said other electrode further has a central axial passage therethrough.

15. The invention according to claim 14 further comprising central laser beam means for directing a laser beam through said central axial passage in said other electrode to impinge said radially inwardly pinched plasma in said constricted area in said gap between said electrodes to further heat said pinched plasma.

16. The invention according to claim 13 wherein said target electrode has a central axial passage therethrough coaxially aligned with said central constricted radially pinched plasma for emitting X-rays therethrough.

17. A method for producing X-rays comprising:

initially generating plasma directly from solid material by axial laser beam impingment at radially spaced locations; and

subsequently generating X-rays by passing high current axially through said plasma causing radially inward magnetic field plasma pinching, said laser beam impingement occuring prior to said plasma pinching.

18. The invention according to claim 17 wherein the X-ray emitting plasma pinched region is at a different location than the laser beam impingement location.

19. Apparatus for producing X-rays comprising:

means for initially generating plasma directly from solid material by axial laser beam impingement at radially spaced locations; and

means for subsequently generating X-rays by passing high current axially through said plasma causing radially inward magnetic field plasma pinching, said laser beam impingement occuring prior to said plasma pinching.

20. The invention according to claim 19 wherein the X-ray emitting plasma pinched region is at a different location than the laser beam impingement location.