Method of coating ceramics and quartz crucibles with material electrically transformed into a vapor phase

• US 4,505,948 A
• Filed: 05/25/1984
• Issued: 03/19/1985
• Est. Priority Date: 05/13/1983
• Status: Expired due to Fees

• Current Assignee: Masco VT Incorporated
• Original Assignee: Wedtech Corp.
• Inventors: Pinkhasov, Eduard
• Primary Examiner(s): Newsome, John H.
• Application Number:
  US06/614,434
• Time in Patent Office: 298 Days
• Field of Search: 427/37, 427/250, 427/295, 427/422, 118/720, 118/723, 118/726, 118/50.1
• US Class Current: 427/580
• CPC Class Codes: C04B 41/81 Coating or impregnation
• CPC Class Codes: C23C 14/22 characterised by the process of coating
• CPC Class Codes: C23C 14/325 Electric arc evaporation
• CPC Class Codes: H01J 37/32055 Arc discharge
• CPC Class Codes: H05K 1/0306 Inorganic insulating substrates, e.g. ceramic, glass
• CPC Class Codes: H05K 3/38 Improvement of the adhesion between the insulating substrate and the metal

Abstract

Quartz crucibles for the melting of silicon and ceramic substrates are coated with protective materials or metals at least in part evaporated from an electrode with which an arc is struck at low voltage and current to deposit material from the electrode on the substrate in a vacuum chamber. The electrode may be heated and the substrate may be sandblasted and preheated.

Claims

1. A method of coating a quartz crucible for use in the melting of silicon which comprises the steps of:

juxtaposing a pair of electrodes, composed of at least one component of a material adapted to coat said crucible, with an interior surface of said crucible;

evacuating the space in which said electrodes are juxtaposed with said surface to a pressure of at most 10^-5 torr and maintaining the pressure in said space substantially no higher than 10^-5 torr during deposition; and

striking an electrical arc between said electrodes at one end of each of said electrodes at a voltage of substantially 30 to 60 volts and with a current of substantially 50 to 90 amperes by intermittently bringing said electrodes into contact with one another and separating them, thereby depositing material evaporated from said electrodes substantially uniformly over said interior surface of said crucible.

2. The method defined in claim 1 wherein at least one of said electrodes is composed of silicon, further comprising the step of controlling the temperature of said one of said electrodes to maintain said temperature in the range of substantially 800°

F. to 1000°

F.

3. The method defined in claim 1 further comprising the step of roughening said surface by blasting particles thereagainst.

4. The method defined in claim 3, further comprising the step of preheating said crucible before striking said arc.

5. A method of coating a ceramic with a metal, comprising the steps of:

receiving a surface of a ceramic substrate by subjecting it to blasting with particles;

preheating said substrate to a temperature of at least 200°

C. but less than the melting point of a metal to be applied thereto;

juxtaposing said surface of said substrarte with an electrode composed of said metal;

evacuating the space in which said electrode is juxtaposed with said substrate to at most 10^-5 torr and maintaining the pressure in said space substantially no higher than 10^-5 torr; and

striking an arc with said electrode by intermittently attacking same with another electrode while applying a voltage of substantially 30 to 60 volts across said electrode and passing a current of substantially 50 to 90 amperes through said electrodes to evaporate the electrode composed of said metal and deposit said metal on said surface.

6. The method defined in claim 5 wherein said metal is composed of nickel, copper, tungsten, titanium or tantalum.

7. The method defined in claim 5 wherein said ceramic is a body of alumina.