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Deformable chuck driven by piezoelectric means

  • US 4,506,184 A
  • Filed: 01/10/1984
  • Issued: 03/19/1985
  • Est. Priority Date: 01/10/1984
  • Status: Expired due to Fees
First Claim
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1. An apparatus for supporting a workpiece, comprising:

  • a deformable chuck having a diameter to thickness ratio greater than or equal to about 40;

    1.a rigid plate; and

    a plurality of displacement means, mounted on the rigid plate and attached to the deformable chuck, for selectably displacing portions of the deformable chuck.

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