Deformable chuck driven by piezoelectric means

• US 4,506,184 A
• Filed: 01/10/1984
• Issued: 03/19/1985
• Est. Priority Date: 01/10/1984
• Status: Expired due to Fees

• Current Assignee: Hewlett-Packard Company (HP Inc.)
• Original Assignee: Varian Associates, Inc. (Siemens AG)
• Inventors: Siddall, Graham J.
• Primary Examiner(s): Budd, Mark O.
• Application Number:
  US06/569,632
• Time in Patent Office: 434 Days
• Field of Search: 310/311, 310/328, 279/1 W, 279/1 D, 279/3
• US Class Current: 310/328
• CPC Class Codes: B23Q 1/032 characterised by properties of the support surface
• CPC Class Codes: B23Q 1/34 Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements sensitive elements capable of producing movement or displacement for purposes not limited to measurement G12B1/00
• CPC Class Codes: H01L 21/6838 with gripping and holding devices using a vacuum; Bernoulli devices
• CPC Class Codes: Y10T 279/11 Vacuum

Abstract

A deformable vacuum pin chuck includes a thin silicon chuck for supporting a semiconductor wafer during lithographic processing and a number of piezoelectric transducers for selectively deforming the chuck. Chuck deformation caused by application of electric potentials to selected transducers may be used to correct flatness deviations in the wafer and, thereby, a desired degree of flatness of the semiconductor wafer may be obtained.

Claims

1. An apparatus for supporting a workpiece, comprising:

a deformable chuck having a diameter to thickness ratio greater than or equal to about 40;

1.

a rigid plate; and

a plurality of displacement means, mounted on the rigid plate and attached to the deformable chuck, for selectably displacing portions of the deformable chuck.

2. An apparatus as in claim 1, wherein each displacement means comprises a piezoelectric transducer.

3. An apparatus as in claim 2, wherein the deformable chuck comprises a single piece of crystalline matter.

4. An apparatus as in claim 3, wherein the deformable chuck further comprises:

a plurality of peaks for supporting said workpiece, said peaks defining a plurality of valleys; and

;

a manifold for application of a vacuum through the valleys to hold the workpiece onto the peaks.

5. An apparatus as in claim 4, further comprising flatness means, coupled to the deformable chuck, for measuring the flatness thereof.

6. An apparatus as in claim 4, wherein the deformable chuck further comprises measurement means for measuring and recording the deformation thereof.