Optimized stress and strain distribution diaphragms

• US 4,507,170 A
• Filed: 09/17/1982
• Issued: 03/26/1985
• Est. Priority Date: 01/07/1980
• Status: Expired due to Term

• Current Assignee: Patriot Sensors & Controls Corp. (Ametek Incorporated)
• Original Assignee: Kjell E. Myhre
• Inventors: Myhre, Kjell E.
• Primary Examiner(s): Powell, William A.
• Application Number:
  US06/419,352
• Time in Patent Office: 921 Days
• Field of Search: 156/629, 156/633, 156/634, 156/654, 156/656, 156/659.1, 29/610 SG, 29/610 R, 73/727, 338/4
• US Class Current: 216/33
• CPC Class Codes: G01L 9/0051 using variations in ohmic resistance
• CPC Class Codes: G01L 9/006 of metallic strain gauges fixed to an element other than the pressure transmitting diaphragm
• CPC Class Codes: G01L 9/008 using piezoelectric devices piezoelectric resonators G01L9/0022; surface acoustic waves G01L9/0025
• CPC Class Codes: H01C 10/10 adjustable by mechanical pressure or force

Abstract

A stress distribution plate, such as a diaphragm for a pressure transducer, has a central plane and a neutral stress plane. According to the invention, the neutral stress plane is displaced from the central plane, providing for a mechanical advantage or amplification in the operation of the stress plate or transducer. The stress plate or diaphragm may be provided with a lacunose surface region or with a predetermined and preferably symmetrical pattern of mesas and recesses for a displacement of the neutral stress plane relative to the central plane.

Claims

1. In a method of manufacturing a stress distribution plate for a pressure transducer having a central plane and a neutral stress plane, the improvement comprising:

displacing the neutral stress plane from the central plane.

2. A method as claimed in claim 1, wherein:

said plate is provided with a first surface and a second surface at opposite sides of said central plane, and with a predetermined pattern of mesas and recesses on the first surface displacing the neutral stress plane from said central plane.

3. A method as claimed in claim 2, wherein:

said mesas are provided with surface areas located on the first surface to produce maximum areas of tension and compression in predetermined areas of the first surface when the plate is under stress.

4. A method as claimed in claim 2, wherein:

said predetermined pattern is provided symmetrically to a central axis of the plate.

5. A method as claimed in claim 4, wherein:

said predetermined pattern is provided with recesses displaced from a central area of the plate.

6. A method as claimed in claim 5, wherein:

said displaced recesses are provided symmetrically about an axis normal to the central axis.

7. A method as claimed in claim 2, wherein:

said predetermined pattern is provided with corresponding recesses and mesas on both sides of a central axis of the plate.

8. A method as claimed in claim 2, wherein:

said predetermined pattern is provided with identical recesses and mesas on both sides of a central axis of the plate.

9. A method as claimed in claim 2, wherein:

said predetermined pattern of mesas and recesses is formed by a chemical etching process.

10. In a method of making a stress distribution plate for use in a pressure transducer, the improvement comprising in combination the steps of:

forming a plate with an upper surface and with a lower surface extending parallel to the upper surface;

providing a neutral pressure plane coincident with the central plane; and

concentrating the stress experienced by the plate to predetermined areas when the plate is flexed, by removing predetermined portions from the plate at the upper surface until the neutral plane is displaced from the central plane.

11. A method as claimed in claim 10, including the step of:

mounting a strain gauge on said upper surface.

12. A method as claimed in claim 10 or 11, wherein:

the neutral stress plane is located between the central plane and the lower surface.

13. A method as claimed in claim 10 or 11, wherein:

said predetermined portions are removed by chemically etching such predetermined portions away from the plate at the upper surface.

14. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:

providing a recess in said diaphragm encompassed by a circumferential edge region of said diaphragm;

providing a promontory projecting from said edge region into said recess and being integral with said diaphragm; and

bonding a strain gauge to said diaphragm in coincidence with said promontory.

15. A method as claimed in claim 14, including the step of:

extending said strain gauge from coincidence with said promontory into coincidence with part of said edge region adjacent said promontory.

16. A method as claimed in claim 14, including the steps of:

providing said promontory as a peninsula located in said recess and connected to said edge region by an isthmus; and

bonding said strain gauge to said diaphragm in coincidence with said isthmus and with adjacent portions of said peninsula and of said edge region.

17. A method as claimed in claim 14, 15 or 16, including the steps of:

providing in said recess a raised island spaced from said promontory and from said edge region and integral with said diaphragm; and

bonding a further strain gauge to said diaphragm in coincidence with said island.

18. A method as claimed in claim 17, including the steps of:

providing said spaced island with an isthmus interconnecting two main portions of said island; and

bonding said further strain gauge to said diaphragm in coincidence with said isthmus of said spaced island.

19. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:

providing a recess in said diaphragm encompassed by a circumferential edge region of said diaphragm;

providing a first promontory projecting from said edge region into said recess and being integral with said diaphragm;

providing a second promontory separate from said first promontory and projecting from said edge region into said recess diametrically opposite from said first promontory and being integral with said diaphragm;

bonding a first strain gauge to said diaphragm in coincidence with said first promontory; and

bonding a second strain gauge to said diaphragm in coincidence with said second promontory.

20. A method as claimed in claim 19, including the steps of:

extending said first strain gauge from coincidence with said first promontory into coincidence with a first part of said edge region adjacent said first promontory; and

extending said second strain gauge from coincidence with said second promontory into coincidence with a second part of said edge region adjacent said second promontory.

21. A method as claimed in claim 19, including the steps of:

providing said first promontory as a first peninsula located in said recess and connected to said edge region by a first isthmus;

providing said second promontory as a second peninsula located in said recess, spaced from said first peninsula, and connected to said edge region by a second isthmus;

bonding said first strain gauge to said diaphragm in coincidence with said first isthmus and adjacent portions of said first peninsula and said edge region; and

bonding said second strain gauge to said diaphragm in coincidence with said second isthmus and adjacent portions of said second peninsula and said edge region.

22. A method as claimed in claim 19, 20 or 21, including the steps of:

providing in said recess a raised island spaced from said first and second promontories and from said edge region and integral with said diaphragm; and

bonding a third strain gauge to said diaphragm in coincidence with said island.

23. A method as claimed in claim 22, including the steps of:

providing said spaced island with an isthmus interconnecting two main portions of said island; and

bonding said third strain gauge to said diaphragm in coincidence with said isthmus of said spaced island.

24. A method as claimed in claim 19, 20 or 21, including the steps of:

provding in said recess first and second raised islands at opposite sides of, and spaced from, said first and second promontories and from each other, and integral with said diaphragm;

bonding a third strain gauge to said diaphragm in coincidence with said first island; and

bonding a fourth strain gauge to said diaphragm in coincidence with said second island.

25. A method as claimed in claim 24, including the steps of:

providing said first island with a first insular isthmus interconnecting two main portions of said first island;

providing said second island with a second insular isthmus interconnecting two main portions of said second island;

bonding said third strain gauge to said diaphragm in coincidence with said first insular isthmus; and

bonding said fourth strain gauge to said diaphragm in coincidence with said second insular isthmus.

26. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:

providing said diaphragm with a central portion having first radial projections and a circumferential edge region having second radial projections and encompassing said central portion and first radial projections, said central portion and first radial projections being separated from said edge region and second radial projections by a recess provided in said diaphragm; and

bonding strain gauges to said diaphragm in coincidence with said projections.

27. A method as claimed in claim 26, wherein:

said recess is perimetrically provided about said central portion and first radial projections and inside of said edge region and second radial projections.

28. A method as claimed in claim 26, wherein:

said recess is provided as a sinuous recess.

29. A method as claimed in claim 26, wherein:

said first and second projections are interdigitated with each other.

30. A method as claimed in claim 26, wherein:

said central portion and first radial projections form a star pattern in said recess.

31. A method as claimed in claim 30, wherein:

said second radial projections are complementary with said star pattern.

32. A method as claimed in claim 26, 27, 28, 29, 30 or 31, wherein:

said recess is provided by etching material away from said diaphragm.

33. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:

providing said diaphragm with a circumferential edge region and a raised central portion spaced inwardly from said circumferential edge region and integral with said diaphragm;

providing diametrically opposed first and second isthmi interconnecting said edge region with said inwardly spaced central portion;

providing said central portion with diametrically opposed and mutually spaced third and fourth isthmi distinct from said first and second isthmi; and

bonding first, second, third and fourth strain gauges to said diaphragm in coincidence with said first, second, third and fourth isthmi, respectively.

34. A method as claimed in claim 33, wherein:

said first and second isthmi are extended along a diameter of said diaphragm.

35. A method as claimed in claim 34, wherein:

said third and fourth isthmi are extended in parallel to said diameter.

36. A method as claimed in claim 33, 34 or 35, wherein:

said first and second isthmi are provided with the aid of first and second recesses provided in said diaphragm between said edge region and said central portion; and

said third and fourth isthmi are provided with the aid of a third recess provided in said raised central portion between said third and fourth isthmi.

37. A method as claimed in claim 36, wherein:

said third recess is extended between said first and second recesses to provide the third isthmus with the aid of said first recess and to provide the fourth isthmus with the aid of said second recess.

38. A method as claimed in claim 33, 34 or 35, wherein:

said first and second isthmi are provided with the aid of first and second recesses provided in said diaphragm between said edge region and said central portion; and

said third and fourth isthmi are provided with the aid of third and fourth recesses provided in said raised central portion.

39. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:

providing said diaphragm with a circumferential edge region and a raised central portion spaced inwardly from said circumferential edge region and integral with said diaphragm;

providing said edge region with a first peninsula extending towards, but being spaced from, said central portion and being connected to said edge region by a first isthmus;

providing said edge region with a second peninsula extending towards, but being spaced from, said central portion opposite said first peninsula, and being connected to said edge region by a second isthmus;

providing said central portion with a third peninsula extending towards, but being spaced fron, said edge region and being connected to said central portion by a third isthmus;

providing said central portion with a fourth peninsula extending towards, but being spaced from, said edge region opposite said third peninsula, and being connected to said central portion by a fourth isthmus; and

bonding first, second, third and fourth strain gauges to said diaphragm along said first, second, third and fourth isthmi, respectively.

40. A method as claimed in claim 39, including the step of:

providing further isthmi between said central portion and edge region.

41. A method as claimed in claim 39, including the steps of:

arranging said first and third peninsulas in a first pair of adjacent but distinct peninsulas; and

arranging said second and fourth peninsulas in a second pair of adjacent but distinct peninsulas.

42. A method as claimed in claim 41, including the steps of:

providing fifth and sixth isthmi extending from said edge region to said central portion along opposite sides of said first pair; and

providing seventh and eighth isthmi extending from said edge region to said central portion along opposite sides of said second pair.

43. A method as claimed in claim 42, including the steps of:

providing in said diaphragm between said edge region and said central portion a first curved recess extending from the fifth isthmus to the seventh isthmus; and

providing in said diaphragm between said edge region and said central portion a second curved recess extending opposite said first curved recess from the sixth isthmus to the eighth isthmus.

44. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:

providing in said diaphragm distinct first, second, third, and fourth isthmi each having a longitudinal dimension;

arranging said first, second, third and fourth isthmi to extend along their longitudinal dimensions in series between opposite marginal diaphragm regions; and

bonding first, second, third and fourth strain gauges, respectively, to said first, second, third and fourth isthmi.

45. A method as claimed in claim 44, including the step of:

arranging said isthmi with their longitudinal dimensions in parallel to a diaphragm diameter extending between said opposite marginal diaphragm regions.

46. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:

providing in said diaphragm a first pair of isthmi having longitudinal dimensions;

providing in said diaphragm a second pair of isthmi having longitudinal dimensions;

arranging said first and second pairs of isthmi to extend with their longitudinal dimensions in series between opposite marginal diaphragm regions; and

bonding first, second, third and fourth strain gauges, respectively, to said first, second, third and fourth isthmi.

47. A method as claimed in claim 46, including the step of:

arranging in parallel the longitudinal dimensions of the isthmi in said first pair; and

arranging in parallel the longitudinal dimensions of the isthmi in said second pair.

48. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:

providing a plurality of distinct recesses in said diaphragm;

arranging said recesses to provide in said diaphragm distinct first, second, third and fourth isthmi between adjacent pairs of said recesses; and

bonding distinct first, second, third and fourth strain gauges, respectively, to said first, second, third and fourth isthmi.

49. A method as claimed in claim 48, including the step of:

providing further recesses in said diaphragm in addition to said recesses providing said first, second, third and fourth isthmi.

50. A method as claimed in claim 49, including the step of:

providing said further recesses and said recesses providing said isthmi in an annular region encompassing a central region on said diaphragm.

51. A method as claimed in claim 49, including the step of:

interconnecting at least some of said further recesses by yet further recesses.

52. A method as claimed in claim 48, wherein:

one of said distinct recesses is provided as a central recess in a central region of said diaphragm; and

the other of said distinct recesses are provided in a planetary manner between said central recess and a circumferential edge region of said diaphragm.

53. A method as claimed in claim 52, wherein:

said first isthmus is provided between said central recess and a first of said other recesses; and

said second isthmus is provided between said central recess and a second of said other recesses.

54. A method as claimed in claim 53, wherein:

said third isthmus is provided between a third and a fourth of said other recesses; and

said fourth isthmus is provided between a fifth and a sixth of said other recesses.

55. A method as claimed in claim 52, wherein:

two of said isthmi are provided, respectively, between two different pairs of said other recesses.

56. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:

providing said diaphragm with a lacunose surface region; and

bonding strain gauges to said diaphragm in coincidence with regions located between lacunae of said lacunose surface region.

57. A method as claimed in claim 56, including the steps of:

forming isthmi between lacunae of said lacunose surface region; and

bonding strain gauges to said diaphragm in coincidence with said isthmi.

58. A method as claimed in claim 56, including the step of:

providing recesses in said surface region interconnecting lacunae of said lacunose surface region.

59. A method as claimed in claim 56, 57 or 58, wherein:

the lacunae in said lacunose surface region, and any recesses, are provided by selectively etching material from said diaphragm.

60. A method of making a transducer diaphragm employing a chemical etching process in combination with a masking technique to control the thickness and the diameter of the active area of the diaphragm, which diaphragm is designed for carrying strain gauges bonded on one face of the diaphragm within the inside edge of an annular support wall, wherein the improvement comprises:

an etching process including the step of etching one face of the diaphragm to chemically mill out a central recess which forms the active portion of the diaphragm as defined by an outer boundary and having a uniform thickness within the boundary with the diameter of the central recess appreciably less than the inner diameter of the annular support wall to displace the active portion of the diaphragm inwardly from the inside edge of the annular support wall, and to chemically mill a peripheral notch extending from the central recess into the nonactive portion of the diaphragm for receiving a compression-sensitive strain gauge.

61. A method as claimed in claim 60, wherein:

said etching step includes chemically milling a central recess having a diameter which is essentially 75-80% of the inner diameter of the annular support wall.

62. A method as claimed in claim 60, wherein:

said etching step includes chemically milling a pair of peripheral notches displaced 180°

apart.

63. A method as claimed in claim 60, wherein:

said etching step includes milling the central recess on one face of the diaphragm and simultaneously milling the marginal edges of the diaphragm on opposite faces of the diaphragm to achieve a uniform thickness for the central recess which is essentially one-half the thickness of the non-active portion of the diaphragm.