Optimized stress and strain distribution diaphragms
First Claim
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1. In a method of manufacturing a stress distribution plate for a pressure transducer having a central plane and a neutral stress plane, the improvement comprising:
- displacing the neutral stress plane from the central plane.
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Abstract
A stress distribution plate, such as a diaphragm for a pressure transducer, has a central plane and a neutral stress plane. According to the invention, the neutral stress plane is displaced from the central plane, providing for a mechanical advantage or amplification in the operation of the stress plate or transducer. The stress plate or diaphragm may be provided with a lacunose surface region or with a predetermined and preferably symmetrical pattern of mesas and recesses for a displacement of the neutral stress plane relative to the central plane.
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Citations
63 Claims
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1. In a method of manufacturing a stress distribution plate for a pressure transducer having a central plane and a neutral stress plane, the improvement comprising:
displacing the neutral stress plane from the central plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. In a method of making a stress distribution plate for use in a pressure transducer, the improvement comprising in combination the steps of:
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forming a plate with an upper surface and with a lower surface extending parallel to the upper surface; providing a neutral pressure plane coincident with the central plane; and concentrating the stress experienced by the plate to predetermined areas when the plate is flexed, by removing predetermined portions from the plate at the upper surface until the neutral plane is displaced from the central plane. - View Dependent Claims (11, 12, 13)
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14. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:
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providing a recess in said diaphragm encompassed by a circumferential edge region of said diaphragm; providing a promontory projecting from said edge region into said recess and being integral with said diaphragm; and bonding a strain gauge to said diaphragm in coincidence with said promontory. - View Dependent Claims (15, 16, 17, 18)
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19. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:
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providing a recess in said diaphragm encompassed by a circumferential edge region of said diaphragm; providing a first promontory projecting from said edge region into said recess and being integral with said diaphragm; providing a second promontory separate from said first promontory and projecting from said edge region into said recess diametrically opposite from said first promontory and being integral with said diaphragm; bonding a first strain gauge to said diaphragm in coincidence with said first promontory; and bonding a second strain gauge to said diaphragm in coincidence with said second promontory. - View Dependent Claims (20, 21, 22, 23, 24, 25)
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26. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:
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providing said diaphragm with a central portion having first radial projections and a circumferential edge region having second radial projections and encompassing said central portion and first radial projections, said central portion and first radial projections being separated from said edge region and second radial projections by a recess provided in said diaphragm; and bonding strain gauges to said diaphragm in coincidence with said projections. - View Dependent Claims (27, 28, 29, 30, 31, 32)
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33. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:
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providing said diaphragm with a circumferential edge region and a raised central portion spaced inwardly from said circumferential edge region and integral with said diaphragm; providing diametrically opposed first and second isthmi interconnecting said edge region with said inwardly spaced central portion; providing said central portion with diametrically opposed and mutually spaced third and fourth isthmi distinct from said first and second isthmi; and bonding first, second, third and fourth strain gauges to said diaphragm in coincidence with said first, second, third and fourth isthmi, respectively. - View Dependent Claims (34, 35, 36, 37, 38)
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39. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:
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providing said diaphragm with a circumferential edge region and a raised central portion spaced inwardly from said circumferential edge region and integral with said diaphragm; providing said edge region with a first peninsula extending towards, but being spaced from, said central portion and being connected to said edge region by a first isthmus; providing said edge region with a second peninsula extending towards, but being spaced from, said central portion opposite said first peninsula, and being connected to said edge region by a second isthmus; providing said central portion with a third peninsula extending towards, but being spaced fron, said edge region and being connected to said central portion by a third isthmus; providing said central portion with a fourth peninsula extending towards, but being spaced from, said edge region opposite said third peninsula, and being connected to said central portion by a fourth isthmus; and bonding first, second, third and fourth strain gauges to said diaphragm along said first, second, third and fourth isthmi, respectively. - View Dependent Claims (40, 41, 42, 43)
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44. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:
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providing in said diaphragm distinct first, second, third, and fourth isthmi each having a longitudinal dimension; arranging said first, second, third and fourth isthmi to extend along their longitudinal dimensions in series between opposite marginal diaphragm regions; and bonding first, second, third and fourth strain gauges, respectively, to said first, second, third and fourth isthmi. - View Dependent Claims (45)
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46. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:
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providing in said diaphragm a first pair of isthmi having longitudinal dimensions; providing in said diaphragm a second pair of isthmi having longitudinal dimensions; arranging said first and second pairs of isthmi to extend with their longitudinal dimensions in series between opposite marginal diaphragm regions; and bonding first, second, third and fourth strain gauges, respectively, to said first, second, third and fourth isthmi. - View Dependent Claims (47)
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48. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:
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providing a plurality of distinct recesses in said diaphragm; arranging said recesses to provide in said diaphragm distinct first, second, third and fourth isthmi between adjacent pairs of said recesses; and bonding distinct first, second, third and fourth strain gauges, respectively, to said first, second, third and fourth isthmi. - View Dependent Claims (49, 50, 51, 52, 53, 54, 55)
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56. In a method of making a transducer diaphragm, the improvement comprising in combination the steps of:
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providing said diaphragm with a lacunose surface region; and bonding strain gauges to said diaphragm in coincidence with regions located between lacunae of said lacunose surface region. - View Dependent Claims (57, 58, 59)
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60. A method of making a transducer diaphragm employing a chemical etching process in combination with a masking technique to control the thickness and the diameter of the active area of the diaphragm, which diaphragm is designed for carrying strain gauges bonded on one face of the diaphragm within the inside edge of an annular support wall, wherein the improvement comprises:
an etching process including the step of etching one face of the diaphragm to chemically mill out a central recess which forms the active portion of the diaphragm as defined by an outer boundary and having a uniform thickness within the boundary with the diameter of the central recess appreciably less than the inner diameter of the annular support wall to displace the active portion of the diaphragm inwardly from the inside edge of the annular support wall, and to chemically mill a peripheral notch extending from the central recess into the nonactive portion of the diaphragm for receiving a compression-sensitive strain gauge. - View Dependent Claims (61, 62, 63)
Specification