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Vibration analyzing device

  • US 4,507,705 A
  • Filed: 08/19/1983
  • Issued: 03/26/1985
  • Est. Priority Date: 08/27/1982
  • Status: Expired due to Term
First Claim
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1. A vibration analyzing device comprising:

  • a semiconductor substrate;

    a vibrator having a vibratable portion, which is generally in the form of a thin plate and comprises a unitary electrode layer, and at least one base portion which is contiguous to said vibratable portion and fixed to said substrate such that said vibratable portion is spaced from said substrate and extends generally parallel to said substrate;

    a fixed electrode layer formed in a surface region of said substrate so as to lie opposite to said vibratable portion of said vibrator such that said electrode layer of said vibrator and said fixed electrode layer provide a variable capacitor; and

    an electric circuit means integrated with said substrate for detecting a change in the capacitance of said variable capacitor.

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