Miniaturized potassium ion sensor
First Claim
1. A chemically sensitive device for monitoring chemical properties, comprising:
- a semiconductor substrate formed from material being slightly doped toward a first polarity;
a depletion-mode field-effect transistor on said substrate, said field-effect transistor having source and drain regions oppositely doped with respect to said substrate with a lightly doped gate region thereinbetween also oppositely doped with respect to said substrate;
a first highly doped region on said substrate of the same polarity of said substrate in electrical contact with said source of said field-effect transistor;
a reference electrode having a reference membrane on said substrate, said reference electrode providing a first potential to said source through said first highly doped region;
a chemically sensitive electrode having a chemically sensitive membrane on said substrate, said chemically sensitive membrane having an increased sensitivity to said chemical property to be monitored relative to said reference membrane, said chemically sensitive electrode being electrically connected to said gate to provide a chemically dependent potential to said gate; and
means for monitoring the current between said source and said drain.
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Accused Products
Abstract
A chemically sensitive device for monitoring chemical properties is described. The device includes a depletion-mode field-effect transistor. Two electrical leads are connected between source and drain region of the field-effect transistor to monitor changes in current or potential resulting from changes in the amount of chemical to be monitored. A reference electrode is attached to a lower substrate surface of the field-effect transistor and electrically connected to the source via a highly doped region adjacent to the source and another highly doped region adjacent to the reference electrode, both having a polarity identical to the substrate. A sensing membrane which is specific to the chemical to be monitored is located on a portion of the substrate remote from the gate region but electrically connected to the gate region to alter conductance between the source and the drain in accordance with the presence or absence of the chemical to be monitored. Thus, the source, gate, drain regions may be completely encapsulated to prevent contamination of the FET by the chemical to be monitored.
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Citations
8 Claims
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1. A chemically sensitive device for monitoring chemical properties, comprising:
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a semiconductor substrate formed from material being slightly doped toward a first polarity; a depletion-mode field-effect transistor on said substrate, said field-effect transistor having source and drain regions oppositely doped with respect to said substrate with a lightly doped gate region thereinbetween also oppositely doped with respect to said substrate; a first highly doped region on said substrate of the same polarity of said substrate in electrical contact with said source of said field-effect transistor; a reference electrode having a reference membrane on said substrate, said reference electrode providing a first potential to said source through said first highly doped region; a chemically sensitive electrode having a chemically sensitive membrane on said substrate, said chemically sensitive membrane having an increased sensitivity to said chemical property to be monitored relative to said reference membrane, said chemically sensitive electrode being electrically connected to said gate to provide a chemically dependent potential to said gate; and means for monitoring the current between said source and said drain. - View Dependent Claims (2, 3, 4, 5)
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6. A chemically sensitive device for monitoring chemical properties, comprising:
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an impedance transformer including a depletion-mode field-effect transistor having a substrate, and source, drain, and gate regions on said substrate; reference electrode means for monitoring a general chemical composition, said reference electrode being supported by such substrate remote from, but internally electrically connected through said substrate to, said source; chemical sensing means for sensing a particular chemical to be monitored, said chemical sensing means being supported by said substrate remote from, but electrically connected to, said gate; and detection means for producing an output signal indicating the difference between the electrical potentials of said reference electrode means and said chemical sensing means, said detection means including a first electrical lead connected to said source and said second electrical lead connected to said drain. - View Dependent Claims (7, 8)
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Specification