Apparatus for thermal treatment of semiconductor wafers by gas conduction incorporating peripheral gas inlet

• US 4,512,391 A
• Filed: 01/29/1982
• Issued: 04/23/1985
• Est. Priority Date: 01/29/1982
• Status: Expired due to Term

• Current Assignee: Varian Semiconductor Equipment Associates Incorporated (Applied Materials Incorporated)
• Original Assignee: Varian Associates, Inc. (Siemens AG)
• Inventors: Harra, David J.
• Primary Examiner(s): Hart, Douglas
• Application Number:
  US06/343,794
• Time in Patent Office: 1,180 Days
• Field of Search: 118/724, 118/725, 118/728, 118/730, 118/69, 204/298, 250/492.2, 165/48 R, 165/139, 165/126, 165/80 R, 165/80 A, 165/80 C, 165/80 E, 165/104.11, 165/104.32, 165/104.33
• US Class Current: 165/48.1
• CPC Class Codes: C30B 25/10 Heating of the reaction chamber or the substrate
• CPC Class Codes: C30B 25/12 Substrate holders or susceptors
• CPC Class Codes: C30B 31/14 Substrate holders or susceptors

Abstract

An apparatus for the uniform thermal treatment of semiconductor wafers by gas conduction holds the wafer in place over a gas filled cavity in opposition to a thermal mass maintained at an appropriate temperature. Gas is introduced behind the semiconductor wafer adjacent its periphery to produce a near-constant gas pressure across the backside of the wafer. The constant pressure produces constant thermal conductivity. Consequently, heat conduction is uniform, the temperature of the wafer is uniform and uniform processing is accomplished across the wafer.

Claims

1. Apparatus for the uniform temperature regulation of a substrate by gas conduction, said apparatus comprising:

a body having a substantial thermal mass which serves to provide heat transfer in respect to a substrate,

said body having wall means forming an end face,

said end face having an annular substrate-support lip projecting outwardly from said end face at a position remote from a center of said end face, whereby when a substrate is positioned against said lip, a chamber is formed by the surfaces of the end face, supporting lip and substrate,

said end face having gas conduction aperture means positioned in an annular locus located adjacent an inner rim of said lip, and said end face being solid everywhere internally of said aperture means,

said body having gas conduction passage means for conducting gas to said aperture means of said end face, whereby when a substrate is positioned against said lip, gas can be introduced into said chamber to conduct heat from one to the other of said end face and a substrate, and

means for controlling temperature of said body, said temperature controlling means being distinct from contact with said gas.

2. Apparatus as claimed in claim 1 wherein said temperature controlling means is cooling means.

3. Apparatus as claimed in claim 1 wherein said temperature controlling means is heating means.

4. Apparatus as claimed in claim 1 wherein said wall means forming said end face comprises a first plate having one side forming said end face and a second plate adjacent the other side on said first plate, one of said plates being recessed to provide a portion of said gas conduction passage means for transmitting gas to said aperture means in said first plate.

5. Apparatus as claimed in claim 1 wherein said end face forms the inner end of said body and said body has an outer end wall opposite said end face, and said temperature controlling means comprises an electrical heater mounted on the outer surface of said outer end wall.

6. Apparatus of claim 1 in combination with a substrate positioned in contact with said lip, said substrate having an outer dimension which is larger than the outer dimension of said lip.

7. Apparatus as claimed in claim 1 wherein said temperature controlling means comprises cooling flange means attached to said body and provided with internal passage means for flow of cooling fluid, and electrical heating means mounted in low thermal resistance contact with said body.

8. Apparatus as claimed in claim 7 wherein said body has a generally cup-shaped portion, said flange means being attached to the outside of the side wall of said cup-shaped portion, and said electrical heating means being mounted on the bottom wall of said cup-shaped portion on the side thereof facing the open end of said cup-shaped portion.

10. Apparatus of claim 1 in combination with a substrate having an outer periphery which is larger than the inner periphery of said lip, means for positioning said substrate in contact with said lip, and said contact between said lip and said substrate being such as to provide a leakage path for gas to flow out of said chamber.

9. A method for uniform temperature regulation of a substrate, said method comprising:

positioning a substrate in contact with a raised peripheral lip of a thermally conductive plate such that a space for gas is provided between said plate and said substrate,

flowing gas into said space through an annular locus of aperture means adjacent to the inside of said lip, and

controlling the temperature of said thermally conductive plate, whereby gas in said space conducts heat from one to the other of said plate and said substrate, said temperature controlling being distinct from contact with said gas.

11. A method for providing uniform gas pressure against a substrate, said method comprising:

positioning a substrate relative to wall means having and end face such that a space for fluid is provided between said end face and said substrate and a leakage path for said fluid exits between an annular peripheral portion of said end face and the corresponding annular portion of said substrate,

flowing a gas into said space around an annular path adjacent to the inside of said leakage path, and

permitting said gas to leak outwardly from said space across said leakage path, whereby substantially constant pressure of gas exists across the face of the substrate in the area inside the inner periphery of said leakage path.

12. An apparatus for providing uniform gas pressure against a substrate comprising:

wall means having an end face with annular substrate-support lip projecting outwardly from said end face at a position remote from a center of said end face, whereby when a substrate is positioned against said lip, a chamber is formed by the surfaces of said end face, supporting lip and substrate, and whereby a leakage path for a gas formed between said lip and a corresponding annular portion of said substrate, and

a multiplicity of gas conduction aperture means positioned in an annular locus adjacent an inner rim of said lip, said end face being solid everywhere internally of said aperture means.