Wire grid polarizer

• US 4,512,638 A
• Filed: 08/31/1982
• Issued: 04/23/1985
• Est. Priority Date: 08/31/1982
• Status: Expired due to Fees

• Current Assignee: Rosemount Analytical, Inc. (Emerson Electric Company)
• Original Assignee: Westinghouse Electric Company LLC (Brookfield Asset Management Incorporated)
• Inventors: Sriram, Sambamurthy, Steinbruegge, Kenneth, Supertzi, Emmanuel
• Primary Examiner(s): ARNOLD, BRUCE
• Application Number:
  US06/413,594
• Time in Patent Office: 966 Days
• Field of Search: 350/370, 350/371-373, 350/394, 350/162.2, 350/1.6, 350/1.7
• US Class Current: 359/352
• CPC Class Codes: G02B 5/3058 comprising electrically conductive elements, e.g. wire grids, conductive particles
• CPC Class Codes: G02F 1/11 based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves acousto-optical deflection G02F1/33

Abstract

An infrared wire grid polarizer is fabricated on an infrared transmissive substrate and consists of alternating transmissive and conductive zones disposed thereon. These polarizers are particularly well suited for use with acoustic-optic tunable filters and can be employed as input and output polarizers therewith. A method of manufacturing a wire grid polarizer with at least 4000 conductors per millimeter is disclosed. The infrared transmissive substrate is selected from the group consisting of silicon crystal and gallium arsenide crystal.

Claims

1. In an infrared acousto-optic tunable filter consisting of:

an input wire grid polarizer adapted to have input infrared radiation directed through the polarizer and to be polarized thereby;

an acousto-optic member, optically aligned with the input polarizer, comprising an acousto-optic crystal and an rf transducer means coupled to the crystal to launch acoustic waves in the crystal which interact with a selected bandwidth portion of the polarized input infrared radiation to shift the polarization of the selected bandwidth portion by 90 degrees so that it is distinguishable from the remaining input infrared radiation, which selected bandwidth portion is a function of the rf energy input frequency;

an output wire grid polarizer optically aligned with the output face of the acousto-optic crystal and oriented with the wires aligned orthogonal to the wires of the input wire grid polarizer, whereby only the 90-degree shifted polarized selected bandwidth portion of the infrared radiation transmitted through the acousto-optic member passes through the output wire grid polarizer for analysis, the improvement wherein said input and output wire grid polarizers each comprise;

a substrate selected from the group consisting of single crystal silicon and single crystal gallium arsenide and having an infrared radiation input surface and an infrared radiation output surface opposite said input surface, both of said surfaces having alternately disposed infrared transmissive zones and electrically conductive zones, said conductive zones having a spacing of at least about 2000 zones per millimeter.

2. The improved infrared acousto-optic tunable filter of claim 1 wherein a plurality of V-shaped grooves define the infrared transmissive zones.

3. The improved infrared acousto-optic tunable filter of claim 2 wherein a portion of each of the plurality of V-shaped grooves has a coating of a conductive material deposited therein rendering said coated portion conductive.

4. The improved infrared acousto-optic tunable filter of claim 3 wherein the infrared transmissive zones have a width less than the wavelength of the infrared radiation transmitted therethrough.

5. A wire grid polarizer for the infrared portion of the electromagnetic spectrum comprising an infrared transmissive substrate with a first surface and a second surface opposite thereto, said first surface being an input surface and said second surface being an output surface, both of said surfaces having infrared transmissive zones and electrically conductive zones alternately disposed thereon, said transmissive zones having a width less than the wavelength of the portion of the infrared spectrum of interest.

6. The wire grid polarizer according to claim 5 wherein the infrared transmissive substrate is selected from the group consisting of single crystal silicon and single crystal gallium-arsenide.

7. The wire grid polarizer according to claim 5 wherein the conductive zones are disposed on the substrate surfaces at the rate of at least 2000 conductive zones per millimeter.

8. The wire grid polarizer according to claim 7 wherein the conductive zones are disposed on the substrate surfaces at the rate of at least 4000 conductive zones per millimeter.

9. In an infrared acousto-optic tunable filter consisting of an input wire grid polarizer adapted to have infrared radiation directed through the polarizer and to be polarized thereby, an acousto-optic member optically aligned with the input polarizer comprising an acousto-optic crystal and an rf transducer means coupled to the crystal to launch acoustic waves in the crystal which interacts with a selected bandwidth portion of the polarized input infrared radiation to shift the polarization of the selected bandwidth portion by 90 degrees so that it is distinguishable from the remaining input infrared radiation, which selected bandwidth portion is a function of the rf energy input frequency, an output wire grid polarizer optically aligned with the output face of the acousto-optic crystal and oriented with the wires aligned orthogonal to the wires of the input wire grid polarizer, whereby only the 90-degree shifted polarized selected bandwidth portion of the infrared radiation transmitted through the acousto-optic member passes through the output wire grid polarizer for analysis, the improvement wherein said input and output wire grid polarizers each comprise:

an infrared transmissive substrate selected from the group consisting of silicon and gallium arsenide, said substrate having a first surface and a second surface opposite thereto, said first surface being an input surface and said second surface being an output surface, both said surfaces having infrared transmissive zones and conductive zones alternately disposed thereon, said transmissive zones having a width less than the infrared wavelength of interest.