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Microelectronic sensor assembly

  • US 4,514,276 A
  • Filed: 04/08/1982
  • Issued: 04/30/1985
  • Est. Priority Date: 10/31/1981
  • Status: Expired due to Fees
First Claim
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1. A miniature sensor assembly for the detection and electrochemical measurement of oxygen and other chemical properties of the environment to which it is exposed, said sensor comprising:

  • an electrically insulating substrate comprising a microelectronic header having a first surface,an integrated circuit amplifier mounted on said first surface of said substrate, said amplifier having at least an input terminal,a plurality of conductive posts situated around the periphery of said first surface of said substrate, said amplifier being centrally disposed with respect to said posts,said amplifier, said plurality of conductive posts, and the adjacent surface of said substrate being encapsulated in a chemically-resistant, electrically inert material having at least one exposed surface,a first noble metal wire connected at one end thereof to one of said conductive posts, said noble metal wire being connected at a point between the ends thereof to said amplifier input terminal, the end of said first noble metal wire opposite said one end extending from said amplifier input terminal in a direction substantially perpendicular to the first surface of said header and terminating at said exposed surface of said electrically inert material, anda conductive electrode encapsulated in said electrically inert material, one end of said conductive electrode terminating at said exposed surface of said electrically inert material, said conductive electrode being electrically connected to one of said plurality of conductive posts, said electrically inert material surrounding said first noble metal wire and said conductive electrode throughout their entire lengths.

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