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Probe head arrangement for conductor line testing with at least one probe head comprising a plurality of resilient contacts

  • US 4,520,314 A
  • Filed: 10/08/1982
  • Issued: 05/28/1985
  • Est. Priority Date: 10/30/1981
  • Status: Expired due to Term
First Claim
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1. Apparatus for contacting and testing a plurality of exposed closely spaced electrically conductive members of very small dimensions comprising:

  • a monolithic comb-shaped structure consisting of a spine with a plurality of elongated teeth depending therefrom so as to provide a plurality of miniature resilient cantilever beams;

    the said spine and said teeth being fabricated of silicon and the said teeth having been selectively processed so as to have a resistance substantially lower than that of similarly configured teeth of pure silicon.solid state integrated circuitry fabricated integral with the said spine portion and connected to each of said teeth and adapted to apply, receive, and test the relativity of potentials on said teeth;

    whereby when the said teeth are applied to said conductors in resilient contact therewith the integrity of the conductors may be determined.

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