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Radiation scatter apparatus and method

  • US 4,525,854 A
  • Filed: 03/22/1983
  • Issued: 06/25/1985
  • Est. Priority Date: 03/22/1983
  • Status: Expired due to Term
First Claim
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1. A radiation scatter apparatus for use in association with a relatively thin overlay material overlying a substrate material to measure the density of the overlay material, the thickness of the overlay material, and the density of the substrate material, said apparatus comprising:

  • source means for emitting gamma radiation into the overlay material and the substrate material;

    detector means including at least three radiation detectors located in predetermined spaced relation to said source for detecting scattered radiation, each detector being so positioned and having such filtering characteristics so as to measure radiation distinctive from the radiation measured by the other detectors; and

    recording means operatively associated with said detector means for separately recording measured radiation information from each said detector for use with derived mathematical relations to determine the density of the overlay material, the thickness of the overlay material, and the density of the substrate material.

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