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Coating method

  • US 4,526,673 A
  • Filed: 12/19/1983
  • Issued: 07/02/1985
  • Est. Priority Date: 09/24/1982
  • Status: Expired due to Fees
First Claim
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1. A process of coating parts comprising:

  • (a) positioning a plurality of parts on a work transport;

    (b) introducing said plurality of parts with said work transport into a coating chamber maintained under vacuum;

    (c) subjecting said plurality of parts to cleaning by ion beam milling in an inert gas environment;

    (d) providing a negative bias to said plurality of parts in said coating chamber;

    (e) exposing said plurality of negatively biased parts within said coating chamber to a beam of ions extracted from an rf excited plasma acting on a feed as introduced into a second chamber adjacent and contiguous with said coating chamber for a time period not exceeding sixty minutes; and

    (f) progressively increasing the beam energy of said beam of ions from about 300 electron-volts to about 1200 electron-volts while said plurality of negatively biased parts are being exposed thereto.

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