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Differential pressure transducer

  • US 4,531,415 A
  • Filed: 10/14/1983
  • Issued: 07/30/1985
  • Est. Priority Date: 10/16/1982
  • Status: Expired due to Term
First Claim
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1. A differential pressure transducer comprising a body of insulating material;

  • two film electrodes disposed on the body;

    two electrically conductive diaphragm electrodes each comprising an insulating diaphragm and a film electrode on a side of the diaphragm facing the body, arranged so as to form a capacitance in conjunction with respective film electrodes, said capacitance being dependent on the diaphragm deflection; and

    means for limiting relative movement of the diaphragm toward the body, said means comprising at least one support on a facing surface of at least one of said body and said diaphragms, extending toward the other of said body and said diaphragm;

    said body, film electrodes and diaphragm electrodes forming closed, interconnected cavities whiich are filled with a liquid,characterized in that the body includes a filling duct, and the supports have groove-like recesses communicating with the filling duct.

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