Electron holography microscope
First Claim
Patent Images
1. An electron holography microscope system comprising:
- (a) an electron holography microscope for producing an interference pattern of a specimen;
(b) image forming means for producing an electrical output signal produced by the scanning of the interference pattern of the specimen formed by the electron holography microscope;
(c) means for generating a signal representing a straight line fringe pattern as a basic fringe pattern produced by scanning an image of spaced apart parallel lines as basic fringes, the spacing between the interference fringes of the interference pattern and the spaced apart parallel lines being such that the ratio of the spacing between adjacent parallel spaced apart lines and the spacing between adjacent interference fringes is 1 or 1/n, where n is an integer;
(d) means for combining the straight line fringe signal and the electrical output signal of the image forming means to produce a composite signal; and
(e) means for displaying the composite signal to produce a composite image of the interference pattern of the specimen and the straight line fringe signal.
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Abstract
The present invention provides an electron holography microscope producing an interference pattern having contour moire lines which is displayed on a cathode-ray tube. With the invention the three-dimensional structure of a specimen can be readily observed on the cathode-ray tube. The electron holography microscope of the present invention comprises a television camera which picks up the interference pattern a straight line fringe output means for delivering a straight line fringe pattern the direction and interval of which are selected at will. Outputs of the television camera and the means are added in a multiplier and the result is displayed on the cathode-ray tube.
30 Citations
10 Claims
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1. An electron holography microscope system comprising:
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(a) an electron holography microscope for producing an interference pattern of a specimen; (b) image forming means for producing an electrical output signal produced by the scanning of the interference pattern of the specimen formed by the electron holography microscope; (c) means for generating a signal representing a straight line fringe pattern as a basic fringe pattern produced by scanning an image of spaced apart parallel lines as basic fringes, the spacing between the interference fringes of the interference pattern and the spaced apart parallel lines being such that the ratio of the spacing between adjacent parallel spaced apart lines and the spacing between adjacent interference fringes is 1 or 1/n, where n is an integer; (d) means for combining the straight line fringe signal and the electrical output signal of the image forming means to produce a composite signal; and (e) means for displaying the composite signal to produce a composite image of the interference pattern of the specimen and the straight line fringe signal. - View Dependent Claims (2, 3, 4, 5)
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6. An electron holography microscope comprising:
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means for irradiating an electron beam into a specimen; means for dividing the electron beam into a specimen electron beam transmitted through the specimen which contains information of the specimen and a reference electron beam passing outside the specimen which functions as a reference of electron beam phase; means for producing an interference pattern of the specimen electron beam and the reference electron beam on a focusing plane of the microscope; an image forming means for producing an electrical output signal produced by scanning the interference pattern formed by the electron holography microscope means; means for generating a straight line fringe signal produced by scanning an image of spaced apart parallel lines as basic fringes, the direction of the basic fringes being identical to the direction of the interference fringes which appear on the focusing plane corresonding to the part outside the specimen, and the period of the basic fringes is equal to, or 1/n of, the period of the interference fringes which appear on the focusing plane corresponding to the part outside the specimen, where n is an integer; means for compositing the straight line fringe signal and the electrical output signal of the specimen to produce a composite signal; and means for displaying the composite signal to produce a composite image of the interference pattern of the specimen and the straight line fringe signal. - View Dependent Claims (7, 8, 9, 10)
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Specification