Machine for beveling

• US 4,535,570 A
• Filed: 05/04/1983
• Issued: 08/20/1985
• Est. Priority Date: 05/04/1982
• Status: Expired due to Fees

• Current Assignee: Tokyo Shibaura Denki Kabushiki Kaisha
• Original Assignee: Tokyo Shibaura Denki Kabushiki Kaisha
• Inventors: Ochiai, Nobuo, Tsumagari, Takashi
• Primary Examiner(s): Whitehead, Harold D.
• Application Number:
  US06/491,645
• Time in Patent Office: 839 Days
• Field of Search: 51/165.77, 51/165.92, 51/165.91, 51/58, 51/165.87, 51/165.74, 51/165.72, 51/123 R
• US Class Current: 451/5
• CPC Class Codes: B24B 9/065 of thin, brittle parts, e.g. semiconductors, wafers
• CPC Class Codes: G05B 19/4166 Controlling feed or in-feed G05B19/4163 takes precedence

Abstract

An apparatus for machining the periphery of a work is provided with a grinding wheel, a holding mechanism for holding the work, and a moving mechanism for moving the holding mechanism toward or away from the wheel. A touch sensor for detecting the contact between a grinding surface of the wheel and a test piece held by the holding mechanism is connected to the wheel and the holding mechanism. The forward or backward movement of the moving mechanism is numerically controlled by a sequence controller using a microcomputer. Data representing the position of the holding mechanism when the touch sensor detects the contact between the grinding surface of the wheel and the test piece is stored in an internal memory of the controller as machining end position data (N1). The memory also prestores machining amount data (N2) and total stroke data (N2+N3). In accordance with the machining end position data (N1), the machining amount data (N2) and the total stroke data (N2+N3), the controller moves the holding mechanism with the work in place of the test piece.

Claims

1. An apparatus for machining the periphery of an electrically nonconductive workpiece, comprising:

a grinding wheel with an electrically conductive grinding surface,

means for holding either said workpiece or, an electrically conductive test piece having a predetermined bevel,

moving means for changing the relative distance between said holding means and said wheel,

touch sensor means for generating a touch signal when the bevel of said test piece held by said holding means electrically contacts the grinding surface of said wheel, and

control means coupled to said touch sensor means and to said moving means, for detecting, when said touch signal is generated, machining end position data (N1) corresponding to the relative distance between said holding means and said wheel, and for actuating, when said workpiece is held by said holding means, said moving means according to said machining end position data (N1), so that machining of the periphery of said workpiece is effected.

2. The apparatus of claim 1, wherein said control means includes:

a memory for storing predetermined machining amount data (N2) and predetermined feeding amount data (N3) which are defined in accordance with the size of said test piece; and

computer means for generating a command signal which determines the relative distance between said holding means and said wheel in accordance with said machining end position data (N1), said machining amount data (N2) and said feeding amount data (N3), said command signal being used for actuating said moving means.

3. The apparatus of claim 2, wherein said moving means includes actuator means for changing the relative distance between said holding means and said wheel in accordance with the command signal from said computer means.

4. The apparatus of claims 3, wherein said holding means is moved by said actuator means so that the periphery of said workpiece is ground by said wheel.

5. The apparatus of claim 1, wherein said workpiece is a silicon wafer.

6. The apparatus of claim 5, wherein said workpiece includes a thyristor.

7. The apparatus of claim 2, wherein:

the relative distance between said holding means and said wheel is changed by forward/backward movement of said holding means;

the relative distance between said holding means and said wheel when said workpiece is mounted on said holding means is determined in accordance with total stroke data (N2+N3) which is a sum of said machining amount data (N2) and said feed amount data (N3), with reference to said machining end position data (N1);

the relative distance between said holding means and said wheel when the periphery of said workpiece is moved in a forward direction to a position immediately in front of said grinding surface of said wheel is determined in accordance with said feeding amount data (N3) with reference to said total stroke data (N2+N3); and

the relative distance between said holding means and said wheel when said workpiece is ground by said grinding surface of said wheel is determined in accordance with said machining amount data (N2).

8. The apparatus of claim 4, wherein:

said moving means includes a movable table on which said holding means is placed, said movable table being movable in a first direction and in a second direction which is different from said first direction; and

said actuator means comprises a first actuator for moving said movable table in said first direction and a second actuator for moving said movable table in said second direction.

9. The apparatus of claim 8, wherein:

said first actuator moves said movable table in said first direction for a distance corresponding to said machining amount data (N2);

said second actuator moves said table in said second direction for a distance corresponding to said feeding amount data (N3); and

said first and second directions are orthogonal.

10. The apparatus of claim 8, wherein said first actuator moves said movable table in said first direction for a distance corresponding to said machining amount data (N2) and said feeding amount data (N3).

11. The apparatus of claim 8, wherein:

said holding means has first motor means for rotating said workpeice; and

said wheel has second motor means for rotating said wheel.

12. The apparatus of claim 8, wherein said wheel has means for reciprocating said wheel in said second direction.

13. The apparatus of claim 8, wherein said second actuator has means for reciprocating said movable table in said second direction when the periphery of said workpiece is ground by said wheel.