Forming multilayer ceramic substrates from large area green sheets
First Claim
1. A method of forming a multilayer ceramic substrate comprising the steps of:
- fabricating an array of layer sites on a large area ceramic green sheet, each layer site comprising a plurality of conductive vias interconnected with a surface conductive pattern, the area of said ceramic green sheet being sufficiently large to preclude alignment of corresponding vias on superimposed large area ceramic green sheets;
aligning a reference mark on one of said layer sites with respect to a die cavity by determining the dimensional offset of said reference mark from its nominal position and indexing said layer site with respect to said die cavity with said dimensional offset being applied such that said reference mark lies a predetermined distance from the edge of said die cavity;
punching the aligned individual layer site into said die cavity;
repeating said aligning and punching steps to stack a plurality of aligned and punched layer sites; and
laminating the stacked plurality of aligned and punched layer sites to form a multilayer ceramic substrate;
whereby the vias in the stacked layer sites are aligned notwithstanding the dimensional distortion of layer sites with respect to one another on said large area ceramic green sheet.
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Accused Products
Abstract
A method and apparatus for forming multilayer ceramic substrates from large area ceramic green sheets, each having an array of layer sites thereon, by serially aligning each individual layer site with respect to a die cavity and punching the aligned layer site into the die cavity to thereby stack the requisite number of aligned layer sites. Individual layer site alignment ensures that each layer site is aligned with respect to the die cavity so that the dimensional tolerances between layer sites on the large area green sheet are eliminated. Thus, as large a green sheet as is cost effective may be employed, notwithstanding the fact that dimensional distortions on the large area green sheet would preclude alignment of corresponding layer site vias on superimposed large area green sheets.
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Citations
10 Claims
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1. A method of forming a multilayer ceramic substrate comprising the steps of:
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fabricating an array of layer sites on a large area ceramic green sheet, each layer site comprising a plurality of conductive vias interconnected with a surface conductive pattern, the area of said ceramic green sheet being sufficiently large to preclude alignment of corresponding vias on superimposed large area ceramic green sheets; aligning a reference mark on one of said layer sites with respect to a die cavity by determining the dimensional offset of said reference mark from its nominal position and indexing said layer site with respect to said die cavity with said dimensional offset being applied such that said reference mark lies a predetermined distance from the edge of said die cavity; punching the aligned individual layer site into said die cavity; repeating said aligning and punching steps to stack a plurality of aligned and punched layer sites; and laminating the stacked plurality of aligned and punched layer sites to form a multilayer ceramic substrate; whereby the vias in the stacked layer sites are aligned notwithstanding the dimensional distortion of layer sites with respect to one another on said large area ceramic green sheet. - View Dependent Claims (2, 3, 4, 5, 6)
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7. Apparatus for forming a multilayer ceramic substrate from a large area ceramic green sheet having an array of layer sites thereon, each layer site comprising a plurality of conductive vias interconnected with a surface conductive pattern, the area of said ceramic green sheet being sufficiently large to preclude alignment of corresponding vias on superimposed large area ceramic green sheets, said multilayer ceramic forming apparatus comprising;
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a die cavity for stacking layer sites therein; means for aligning a reference mark on a layer site with respect to said die cavity; means for punching an aligned layer site from a large area ceramic green sheet into said die cavity; whereby the vias in each stacked layer site in said die cavity are aligned notwithstanding the dimensional distortion of layer sites with respect to one another on said large area ceramic green sheet; and means for preventing green sheet debris from falling into said die cavity. - View Dependent Claims (8, 9, 10)
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Specification