Semiconductor laser CRT

• US 4,539,687 A
• Filed: 12/27/1982
• Issued: 09/03/1985
• Est. Priority Date: 12/27/1982
• Status: Expired due to Fees

• Current Assignee: Bell Telephone Laboratories, Inc. (Nokia Corporation)
• Original Assignee: AT&T, Inc.
• Inventors: Gordon, Eugene I., Levy, Uri
• Primary Examiner(s): DAVIE, JAMES W
• Application Number:
  US06/453,577
• Time in Patent Office: 981 Days
• Field of Search: 372/24, 372/43, 372/74, 372/92, 372/99, 372/44, 313/421, 313/463, 313/474, 315/3, 315/4
• US Class Current: 372/43.01
• CPC Class Codes: H01S 5/04 Processes or apparatus for excitation, e.g. pumping, e.g. by electron beamsH01S5/06 takes precedence
• CPC Class Codes: H01S 5/20 Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers

Abstract

Room temperature laser action is achieved in a cathode ray tube (CRT) in which the target includes a plurality of semiconductor layers: a thin, wide bandgap buffer layer; a thicker, narrow bandgap active layer; and a much thicker wide bandgap cavity-length-adjusting layer. The light beam direction is essentially parallel to the e-beam direction and hence is scannable.

Claims

1. A scannable semiconductor laser comprising

a semiconductor target,

a source of an electron beam, and

means for scanning said electron beam across said target to generate a scanning laser light beam therefrom in essentially the same direction as that of said electron beam, characterized in that said target comprises

a pair of mirrors, at least one of which is metallic, forming a cavity resonator at the optical wavelength of said light beam, said scanning means making said electron beam incident on said metallic mirror, and

a plurality of epitaxial, essentially lattice-matched layers of the same conductivity type between said mirrors, said plurality including:

a relatively thin, wide bandgap, buffer layer adjacent said one mirror;

a thicker, wide bandgap, cavity-length-adjusting layer adjacent said other mirror; and

a narrower bandgap active layer between said buffer layer and said cavity-length-adjusting layer,

the energy of said electron beam and the thicknesses of said buffer layer and said active layer being mutually adapted so that the peak of the electron energy absorption lies within said active layer.

2. The laser of claim 1 including an evacuable tube, said source being located at one end of said tube and said target at the other end of said tube, said target including a transparent substrate to which the other of said mirrors is affixed, said substrate being sealed to said other end of said tube.

3. The laser of claim 2 wherein said substrate comprises a sapphire disk.

4. The laser of claim 1, 2, or 3 wherein said buffer layer comprises Al_x Ga_1-x As, said active layer comprises Al_y Ga_1-y As, and said cavity-length-adjusting layer comprises Al_z Ga_1-z As, where y<

x, z.

5. The laser of claim 4 wherein said layers have n-type conductivity.

6. The laser of claim 4 wherein said layers are unintentionally or lightly doped.

7. The laser of claim 1 wherein said buffer and cavity-length-adjusting layers comprise InP and said active layer comprises InGaAsP.

8. The laser of claim 1 wherein the thickness of said cavity-length-adjusting layer and the diameter of said electron beam are mutually adapted to limit laser oscillation to the lowest order mode of said resonator.

9. The laser of claim 1 wherein the ratio of the thickness of said active layer to that of said buffer layer is in the range of approximately 1.8:

1 to 6;

1.

10. The laser of claim 9 wherein said cavity-length-adjusting layer is at least about 5-15 times thicker than said active and buffer layers taken together.

11. The laser of claim 9 wherein said active layer is about 1.8-3.0 μ

m thick.

12. A scannable semiconductor laser comprising

an evacuable tube,

a scannable electron beam source located near one end of said tube,

a target located at the other end of said tube, said electron beam being incident on said target so as to generate a light beam essentially parallel to the direction of said electron beam, said target comprising

a transparent substrate sealed to said other end of said tube,

a partially transparent first mirror on said substrate,

a relatively thick Al_z Ga_1-z As cavity-length-adjusting layer adjacent said first mirror,

a thinner Al_y Ga_1-y As active layer adjacent said cavity-length-adjusting layer,

a still thinner Al_x Ga_1-x As buffer layer adjacent said active layer, where y<

x, z, and

a highly reflecting second mirror, including a metal layer, on said buffer layer, said mirrors forming a cavity resonator therebetween, and

means for applying to said metal layer a positive potential relative to said electron beam source,

said electron beam being focused and incident on said second metal layer so that electrons penetrate through said buffer layer into said active layer, thereby to generate said light beam which emanates from said active region and through said substrate in essentially the same direction as said electron beam,

the thicknesses of said buffer and active layers being mutually adapted so that the peak of electron beam energy absorption occurs in said active layer, and

the thickness of said cavity-length-adjusting layer being mutually adapted with the diameter of said electron beam to limit laser oscillation to the lowest order mode of said resonator.

13. The laser of claim 12 wherein the ratio of the thickness of said active layer to that of said buffer layer is in the range of approximately 1.8:

1 to 6;

1.

14. The laser of claim 13 wherein said adjusting layer is 5-15 times thicker than said active and buffer layers taken together.

15. The laser of claim 13 wherein said active layer is about 1.8-3.0 μ

m thick.

16. For use in an electron-beam-pumped semiconductor laser in which a light beam is generated essentially parallel to the electron beam, a target comprising

a pair of mirrors forming a cavity resonator at the optical wavelength of said light beam, at least one of said mirrors including a metal layer,

said electron beam being incident on said metal layer,

a plurality of epitaxial, essentially lattice-matched layers of the same conductivity type between said mirrors, said plurality including:

a relatively thin, wide bandgap, buffer layer adjacent said one mirror;

a thicker, wide bandgap, cavity-length-adjusting layer adjacent said other mirror; and

a narrower bandgap, active layer between said buffer layer and said cavity-length-adjusting layer,

the thicknesses of said buffer layer and said active layer being mutually adapted so that the peak of the electron energy absorption lies within said active layer.