Process for forming a graded index optical material and structures formed thereby
First Claim
1. A process for depositing on the surface of a substrate a layer of a chosen material in which the index of refraction of said layer varies in a predetermined continuous and periodic pattern as a function of the thickness of said layer, comprising the steps of:
- (a) providing said substrate;
(b) providing first and second selected vapor phase reactants which react upon inducement by radiation of a selected wavelength to form said chosen material which deposits on said substrate;
(c) exposing said substrate to said first and second vapor phase reactants in predetermined proportions in the presence of said radiation to deposit said chosen material having a first predetermined stoichiometric composition and a first predetermined index of refraction;
(d) altering said predetermined proportions of said first and second vapor phase reactants as a function of time in a continuous manner to correspondingly alter in a continuous manner said stoichiometric composition and said index of refraction of said chosen material deposited as a function of time and to thereby produce said graded index of refraction in said chosen material; and
(e) repeating said altering of step "d" for the number of times required to produce said variation of said refractive index in said predetermined continuous and periodic pattern as a function of said thickness of said layer.
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Accused Products
Abstract
A process for depositing on the surface of a substrate a layer of a chosen material having continuous gradations in refractive index in a predetermined periodic pattern. The substrate is exposed to two vapor phase reactants which react upon radiation-inducement to produce the chosen material, and the relative proportion of the reactants is varied in a predetermined and continuous sequence to produce continuous gradations in the stoichiometric composition and refractive index of the deposited layer as a function of thickness. Additionally, predetermined changes in refractive index and/or thickness across the horizontal surface of the substrate may be produced in combination with the change in refractive index as a function of thickness. Diffraction optical elements formed by such a process include various optical filters and reflective optical coatings.
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Citations
22 Claims
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1. A process for depositing on the surface of a substrate a layer of a chosen material in which the index of refraction of said layer varies in a predetermined continuous and periodic pattern as a function of the thickness of said layer, comprising the steps of:
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(a) providing said substrate; (b) providing first and second selected vapor phase reactants which react upon inducement by radiation of a selected wavelength to form said chosen material which deposits on said substrate; (c) exposing said substrate to said first and second vapor phase reactants in predetermined proportions in the presence of said radiation to deposit said chosen material having a first predetermined stoichiometric composition and a first predetermined index of refraction; (d) altering said predetermined proportions of said first and second vapor phase reactants as a function of time in a continuous manner to correspondingly alter in a continuous manner said stoichiometric composition and said index of refraction of said chosen material deposited as a function of time and to thereby produce said graded index of refraction in said chosen material; and (e) repeating said altering of step "d" for the number of times required to produce said variation of said refractive index in said predetermined continuous and periodic pattern as a function of said thickness of said layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 12, 13, 14, 15, 16)
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8. A process for depositing on the surface of a substrate a layer of an oxide material with a graded index of refraction and a predetermined periodic refractive index profile throughout the thickness of said layer, comprising the steps of:
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(a) providing said substrate; (b) providing a selected vapor phase reactant and a chosen oxygen-containing precursor which react upon inducement by radiation of a selected wavelength to form said oxide material which deposits on said substrate; (c) exposing said substrate to said vapor phase reactant and said oxygen-containing precursor in predetermined proportions in the presence of said radiation to form said oxide material having a first predetermined stoichiometric composition and a first predetermined index of refraction; (d) altering said predetermined proportions of said vapor phase reactant and said oxygen-containing precursor as a function of time in a continuous manner to correspondingly alter in a continuous manner said stoichiometric composition and said index of refraction of said oxide material deposited as a function of time and to thereby produce said graded index of refraction in said oxide material; and (e) repeating said altering of step "d" for the number of times required to produce said predetermined periodic refractive index profile throughout said thickness of said layer. - View Dependent Claims (9, 10)
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11. An article of manufacture comprising:
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(a) a selected substrate; and (b) a layer of a uniform chosen material deposited on the surface of said substrate to a predetermined thickness wherein said layer as deposited has a stoichiometric composition which varies in a predetermined periodic and continuous pattern as a function of said thickness to produce successive gradations in the index of refraction in said layer in said predetermined periodic pattern.
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17. An article of manufacture comprising:
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(a) a selected substrate; and (b) a layer of a chosen material deposited on the surface of said substrate to a thickness having a predetermined profile wherein the stoichiometric composition of said layer as deposited varies in a first predetermined periodic and continuous pattern as a function of thickness and in a second predetermined pattern across the horizontal said surface of said substrate to produce successive gradations in said index of refraction in said first and second predetermined patterns as a function of said thickness and as a function of the lateral position on said horizontal surface of said substrate. - View Dependent Claims (18, 19)
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20. An article of manufacture comprising:
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(a) a selected substrate; and (b) a layer of a chosen material deposited on the surface of said substrate to a thickness having a predetermined variation in profile across said surface of said substrate wherein the stoichiometric composition of said layer varies in a predetermined periodic and continuous pattern as a function of said thickness to produce successive gradations in the index of refraction of said layer in said predetermined pattern.
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21. A process for depositing on the surface of a substrate a layer of a chosen substance comprising a composite of first and second chosen materials, in which the index of refraction of said layer varies in a predetermined continuous and periodic pattern as a function of the thickness of said layer, comprising the steps of:
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(a) providing said substrate; (b) providing first and second selected vapor phase reactants which react upon inducement by radiation of a selected wavelength to form said first chosen material which deposits on said substrate; (c) providing a third selected vapor phase reactant which reacts with said first selected vapor phase reactant upon inducement by radiation of said selected wavelength to form said second chosen material which deposits on said substrate; (d) exposing said substrate to said first, second, and third vapor phase reactants in predetermined proportions in the presence of said radiation to deposit said chosen substance having a first predetermined stoichiometric composition and a first predetermined index of refraction; (e) altering said predetermined proportions of said first, second, and third vapor phase reactants as a function of time in a continuous manner to correspondingly alter in a continuous manner said stoichiometric composition and said index of refraction of said chosen substance deposited as a function of time; and (f) repeating said altering of step "e" for the number of times required to produce said variation of said refractive index in said predetermined continuous and periodic pattern as a function of said thickness of said layer. - View Dependent Claims (22)
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Specification