Charged particle beam apparatus
First Claim
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1. A charged particle beam apparatus comprising:
- means for generating a beam of charged particles;
a lens system including a magnetic lens for focussing said beam and an electric lens arranged in parallel with the magnetic lens, the strength of said electric lens being subject to variation independently of said magnetic lens by variation of electrical potentials applied to said electric lens without causing the beam to rotate, fine focussing of said beam being facilitated by said strength variation of said electric lens.
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Abstract
The apparatus, which may be an electron beam column, has a lens system for coarse- and fine-focus adjustments of the beam. The coarse-focus is effected by a magnetic lens (10) and the fine-focus by an electric lens (14) in parallel with the magnetic lens. The electric lens may comprise a plurality of electrically conductive cylinders (14a to 14d) inside the magnetic lens. The cylinders are so arranged that, by applying appropriate potentials to them, fine-focus adjustments can be carried out without causing the beam to rotate.
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Citations
18 Claims
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1. A charged particle beam apparatus comprising:
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means for generating a beam of charged particles; a lens system including a magnetic lens for focussing said beam and an electric lens arranged in parallel with the magnetic lens, the strength of said electric lens being subject to variation independently of said magnetic lens by variation of electrical potentials applied to said electric lens without causing the beam to rotate, fine focussing of said beam being facilitated by said strength variation of said electric lens. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification