Non-volatile memory cell fuse element

• US 4,546,454 A
• Filed: 11/05/1982
• Issued: 10/08/1985
• Est. Priority Date: 11/05/1982
• Status: Expired due to Term

• Current Assignee: Atmel Corporation (Microchip Technology Incorporated)
• Original Assignee: Seeq Technology, Inc. (Broadcom, Inc.)
• Inventors: Gupta, Anil, Perlegos, George
• Primary Examiner(s): Popek, Joseph A.
• Application Number:
  US06/439,602
• Time in Patent Office: 1,068 Days
• Field of Search: 365/200, 365/210, 371/10, 371/11
• US Class Current: 365/200
• CPC Class Codes: G11C 16/0441 comprising cells containing multiple floating gate devices, e.g. separate read-and-write FAMOS transistors with connected floating gates
• CPC Class Codes: G11C 17/16 using electrically-fusible links
• CPC Class Codes: G11C 29/789 using non-volatile cells or latches
• CPC Class Codes: H01L 23/5256 comprising fuses, i.e. connections having their state changed from conductive to non-conductive
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A non-volatile memory cell circuit is used to replace a polysilicon fuse as an enabling element for a redundant row or column of memory cells in a semiconductor memory array. The fuse is divided into read and program sections, allowing a large device to be used for reading and a small device to be used for programming, thus permitting programming of all fuses in a redundant row simultaneously with minimal current consumption. The circuit may be embodied as a five-device or a four-device configuration.

Claims

1. A semiconductor circuit for enabling a redundant word line in a semiconductor memory array, said circuit including:

non-volatile memory means capable of assuming a first unprogrammed state and a second programmed state;

addressing means responsive to addressing signals and coupled to said non-volatile memory means for selecting said non-volatile memory means for programming;

programming means adapted to receive programming signals for selectively causing said non-volatile memory means to change from said first to said second state in response to said programming and addressing signals;

semiconductor switching means connected between said redundant word line and said non-volatile memory means and responsive to said addressing signals for determining whether said non-volatile memory means is in said first or said second state and further for disabling said redundant word line in response to said first state and for enabling said redundant word line in response to said second state.

2. The circuit of claim 1 wherein said non-volatile memory means comprises two floating gate MOS transistors sharing a common floating gate.

3. The circuit of claim 2 wherein the first of said MOS floating gate transistors responds to said programming and addressing signals to change said non-volatile memory means from said first to said second state and wherein the second of said MOS floating gate transistors indicates whether said non-volatile memory means is in said first or said second state.

4. The circuit of claim 3 wherein the first one of said two floating gate MOS transistors is an EEPROM device having a thin tunnel dielectric portion between its said floating gate and its substrate and the second one of said two floating gate MOS transistors is an EPROM type device.

5. The circuit of Claim 4 wherein said semiconductor switching means, said addressing means and said programming means comprise MOS transistors.

6. The circuit of claims 3, 4 and 5 wherein said first one of said floating gate MOS transistors is 4 microns by 3 microns in size and said second one of said MOS floating gate transistors is 50 microns by 3 microns in size.

7. The circuit of claim 5 wherein said semiconductor switching means comprises an MOS transistor switch connected between said second one of said MOS floating gate transistors and said redundant word line, and said programming means comprises an MOS transistor switch connected between the first one of said MOS floating gate transistors and a source of said programming signals.

8. The circuit of claim 3 wherein said floating gate MOS transistors are EPROM devices.

9. The circuit of claim 8 wherein said semiconductor switching means and said programming means comprise MOS transistors.

10. The circuit of claim 9 wherein said semiconductor switching means comprises first MOS transistor switch connected between said second one of said MOS floating gate transistors and said redundant word line, and said programming means includes a second MOS transistor switch connected between the first one of said MOS floating gate transistors and a source of said programming signals.

11. The circuit of claim 10 further including a third MOS transistor connected to the gates of said semiconductor switching means and said programming means and a source of programming signals, the gate of said third MOS transistor connected to a source of said addressing signals.

12. The circuit of claim 9 wherein said semiconductor switching means comprises a first MOS transistor switch connected between the second one of said floating gate MOS transistors and said redundant word line and said programming means comprises a second MOS transistor switch connected between the control gates of said MOS floating gate transistors and a source of programming signals, said second MOS transistor switch driven by a source of addressing signals.

13. A semiconductor circuit for enabling a redundant word line in a semiconductor memory array, said circuit including:

non-volatile memory means capable of assuming a first unprogrammed state and a second programmed state;

programming means coupled to said non-volatile memory means and adapted to receive programming signals for selectively causing said non-volatile memory means to change from said first to said second state in response to said programming signals, said programming means including addressing means responsive to addressing signals for selecting said non-volatile memory means;

semiconductor switching means connected between said redundant word line and said non-volatile memory means and responsive to said addressing signals for determining whether said non-volatile memory means is in said first or said second state and further for disabling said redundant word line in response to said first state and for enabling said redundant word line in response to said second state.