Detector array module-structure and fabrication
First Claim
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1. A photo-detector array module comprising:
- a plurality of integrated-circuit-providing semiconductor substrates of substantially identical dimensions stacked and secured together to form a multiple layer structure, one end of which terminates in a focal plane and the other end of which terminates in a back plane, the semiconductor substrates extending in layers perpendicular to the focal plane and back plane;
the focal plane end of each substrate having thereon a multiplicity of closely spaced electrical contact points provided by the ends of the metal leads formed as part of the integrated circuitry on the substrate, the electrical contact points on the focal plane end of each semiconductor substrate having a predetermined substantially exact spatial relationship with the electrical contact points on the focal plane end of the other stacked semiconductor substrates;
insulation layers between adjacent substrates to insulate the body of each substrate from adjacent substrates in the stack;
insulation covering the entire focal plane end of the stacked substrates except for the contact points thereon, and preventing current leakage between the contact points and the focal plane ends of the substrates;
the back plane end of each substrate having a multiplicity of electrical contact points thereon; and
insulation covering the back plane end of the stacked substrates except for the contact points thereon, and preventing current leakage between the contact points and the back plane ends of the substrates.
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Abstract
A photo detector array module is disclosed which comprises a stack of semiconductor chips having integrated circuitry on each chip. To permit the emplacement of photo-detectors on the focal plane end, and of thin film circuitry on the back plane end, each plane is etched to cut back the semiconductor material, then covered with passivation material, and thereafter lapped to uncover the ends of electrical leads on the chips.
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Citations
8 Claims
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1. A photo-detector array module comprising:
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a plurality of integrated-circuit-providing semiconductor substrates of substantially identical dimensions stacked and secured together to form a multiple layer structure, one end of which terminates in a focal plane and the other end of which terminates in a back plane, the semiconductor substrates extending in layers perpendicular to the focal plane and back plane; the focal plane end of each substrate having thereon a multiplicity of closely spaced electrical contact points provided by the ends of the metal leads formed as part of the integrated circuitry on the substrate, the electrical contact points on the focal plane end of each semiconductor substrate having a predetermined substantially exact spatial relationship with the electrical contact points on the focal plane end of the other stacked semiconductor substrates; insulation layers between adjacent substrates to insulate the body of each substrate from adjacent substrates in the stack; insulation covering the entire focal plane end of the stacked substrates except for the contact points thereon, and preventing current leakage between the contact points and the focal plane ends of the substrates; the back plane end of each substrate having a multiplicity of electrical contact points thereon; and insulation covering the back plane end of the stacked substrates except for the contact points thereon, and preventing current leakage between the contact points and the back plane ends of the substrates. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A module, wich contains densely-packed electronic components and which is adapted to carry on a front planar supporting surface an array of closely spaced electro-optical electronic-radiative energy conversion elements, comprising:
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a plurality of integrated-circuit-providing semiconductor substrates of substantially identical dimensions stacked and secured together to form a multiple layer structure, one end of which terminates in a front plane and the other end of which terminates in a back plane, the semiconductor substrates extending in layers perpendicular to the front plane and back plane; the front plane end of each substrate having thereon a multiplicity of closely spaced electrical contact points provided by the ends of the metal leads formed as part of the integrated circuitry on the substrate, the electrical contact points on the front plane end of each semiconductor substrate having a predetermined substantially exact spatial relationship with the electrical contact points on the front plane end of the other stacked semiconductor substrates; insulation layers between adjacent substrates to insulate the body of each substrate from adjacent substrates in the stack; insulation covering the entire front plane end of the stacked substrates except for the contact points thereon, and preventing current leakage between the contact points and the front plane ends of the substrates; the back plane end of each substrate having a multiplicity of electrical contact points thereon; and insulation covering the back plane end of the stacked substrates except for the contact points thereon, and preventing current leakage between the contact points and the back plane ends of the substrates. - View Dependent Claims (8)
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Specification