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Silicon accelerometer

  • US 4,553,436 A
  • Filed: 11/09/1982
  • Issued: 11/19/1985
  • Est. Priority Date: 11/09/1982
  • Status: Expired due to Fees
First Claim
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1. An acceleration sensor comprising:

  • a substantially planar semiconductor support frame;

    four flexible, elongate semiconductor support members each rigidly attached at a first end to said support frame, and disposed substantially perpendicular to each adjacent support member;

    a semiconductor deflection mass positioned internally of and movable relative to said support frame, in a direction perpendicular to the plane of said support frame, and attached to a second end of said support members; and

    piezoresistive means for sensing stress in said support members, said piezoresistive means oriented with respect to a crystalline plane and capable of providing a differential output as a function of the magnitude and direction of bending of said support members.

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