Gas stream purification
First Claim
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1. A process for the purification of silane, said process comprising contacting silane contaminated with ethylene with a zeolite which has a pore structure that selectively removes ethylene and recovering the purified silane.
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Abstract
A process for the removal of ethylene from silane. Hydrocarbon-contaminated silane is preferably first distilled in a conventional distillation column to remove hydrocarbons boiling higher and lower than silane. Ethylene is removed by passing the silane stream through a column of zeolite, preferably zeolite A having a 4 Angstrom micropore. The 4 Angstrom zeolite A has a high capacity for ethylene and is readily regenerated.
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19 Claims
- 1. A process for the purification of silane, said process comprising contacting silane contaminated with ethylene with a zeolite which has a pore structure that selectively removes ethylene and recovering the purified silane.
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13. A process for the removal of hydrocarbon contaminants from silane said process comprising the steps of:
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(a) distilling silane contaminated with hydrocarbon contaminants including ethylene so as to remove hydrocarbons other than ethylene; (b) passing the distilled silane through a zeolite having a pore structure that selectively removes ethylene; and (c) recovering the purified silane. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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Specification