Multilayer hybrid integrated circuit

• US 4,554,229 A
• Filed: 04/06/1984
• Issued: 11/19/1985
• Est. Priority Date: 04/06/1984
• Status: Expired due to Term

• Current Assignee: AT&T, Inc.
• Original Assignee: AT&T Teleholdings Incorporated (AT&T, Inc.)
• Inventors: Small, Richard D. Jr.
• Primary Examiner(s): Kittle, John E.
• Assistant Examiner(s): Dees, Jose G.
• Application Number:
  US06/597,626
• Time in Patent Office: 592 Days
• Field of Search: 430/280, 430/286, 430/287, 430/14, 430/17, 430/314, 430/315, 430/319, 430/920, 361/397, 361/412, 174/68.5, 428/901
• US Class Current: 430/17
• CPC Class Codes: G03F 7/027 Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds G03F7/075 takes precedence
• CPC Class Codes: H01L 23/5383 Multilayer substrates H01L23/5385 takes precedence; multilayer metallisation on monolayer substrates H01L23/538
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H05K 2201/0133 Elastomeric or compliant polymer elastomeric conductor H05K2201/0314
• CPC Class Codes: H05K 2201/09509 Blind vias, i.e. vias having one side closed
• CPC Class Codes: H05K 3/0023 by exposure and development of a photosensitive insulating layer
• CPC Class Codes: H05K 3/4676 Single layer compositions
• CPC Class Codes: Y10S 428/901 Printed circuit
• CPC Class Codes: Y10S 430/121 Nitrogen in heterocyclic ring

Abstract

A multilayer circuit device comprises a substrate having a plurality of metallized patterns thereon said patterns being separated by a photodefined polymeric dielectric film formed from a polymeric photodefinable triazine base mixture including a photosensitive acrylate moiety. The various circuit patterns are interconnected by means of microvias through the polymeric film or film layers.

Claims

1. A multilayer circuit device comprising a substrate having a metallized pattern thereon and a plurality of polymeric dielectric film layers each having a metallized circuit pattern thereon with metallized microvias interconnecting the metallized patterns of one layer with that of at least one other metallized layer thereunder, said polymeric dielectric layer being formed from a photodefinable triazine base mixture including a photosensitive acrylate moiety wherein the triazine comprises from 40-65 weight percent of the mixture.

2. The device of claim 1, wherein the triazine mixture comprises 40 to 65 weight percent triazine, 0 to 30 weight percent rubber resin, 0 to 50 weight percent of a member selected from the group consisting of an epoxy acrylate hybrid resin and a combination comprising an epoxy resin and an acrylate resin wherein when the percent of both the epoxy acrylate hybrid and acrylate resin in the triazine mixture is zero, the acrylate moiety is on the triazine molecule, 0 to 12 weight percent of a hardener, 0 to 8 weight percent of a crosslinking agent, 0 to 5 weight percent of a coupling agent and 1/2 to 3 weight percent of a photoinitiator.

3. The device as set forth in claim 2, wherein the rubber resin is an acrylonitrile butadiene rubber, the epoxy and acrylate is in the form of a hybrid epoxy-acrylate resin which is carboxy or vinyl terminated and the coupling agent is a silane coupling agent.

4. The device recited in claim 3 further including N-vinylpyrrolidone as the hardener, and 2,2-dimethoxy-2-phenylacetophenone as the photoinitiator.

5. The device as recited in claim 2 further including a surfactant and a copper chelate thermostabilizer.

6. The device as recited in claim 1, wherein the triazine mixture comprises:

triazine--50-60 weight percent;

half acrylate of the diglycidyl ether of bisphenol-A--20-30 weight percent;

N-vinylpyrrolidone--5-12 weight percent;

trimethylolpropanetriacrylate--2-6 weight percent;

glycidoxypropyltrimethoxysilane--2-5 weight percent; and

2,2-dimethoxy-2-phenylacetophenone--1-3 weight percent.

7. The device recited in claim 1, wherein the triazine mixture comprises:

triazine--50-60 weight percent;

acrylated acrylonitrile butadiene rubber--10-25 weight percent;

half acrylate of the diglycidyl ether of bisphenol-A--5-15 weight percent;

N-vinylpyrrolidone--5-12 weight percent;

epoxy propylacrylate--1-5 weight percent;

trimethylolpropanetriacrylate--2-6 weight percent;

glycidoxypropyltrimethoxysilane--2-5 weight percent; and

2,2-dimethoxy-2-phenylacetophenone--1-3 weight percent.

8. The device recited in claim 1, wherein the triazine mixture comprises:

triazine--50-55 weight percent;

acrylated acrylonitrile butadiene rubber--20-30 weight percent;

half acrylate of the diglycidyl ether of bisphenol-A--5-15 weight percent;

N-vinylpyrrolidone--5-12 weight percent;

trimethylolpropanetriacrylate--2-4 weight percent;

glycidoxypropyltrimethoxysilane--1-5 weight percent;

2,2-dimethoxy-2-phenylacetophenone--1-3 weight percent;

pigment--0.25-1 weight percent;

surfactant--0.1-1 weight percent; and

stabilizer--0.2-1 weight percent.

9. An electronic device having a layer thereon which layer is formed from a photodefinable triazine based mixture wherein the triazine comprises from 40-65 weight percent of the mixture.