Pressure and temperature sensor
First Claim
1. A pressure and temperature sensor comprising:
- a piezoresistive element having first and second legs electrically interconnected at one end thereof;
pressure imparting means for imparting pressures to be measured to only said first leg;
resistor means exhibiting a predetermined value of resistance;
first means for sensing resistance exhibited by said first and second legs of said piezoresistive element such that temperature variations in said first leg are compensated by corresponding temperature variations in said second leg to thereby provide an inherently temperature independent output signal corresponding to said pressure to be measured; and
second means for sensing resistance exhibited by said second leg and said resistor means, said second means for providing a pressure independent output signal corresponding to environmental temperature.
1 Assignment
0 Petitions
Accused Products
Abstract
A gauge element for and a pressure sensor for sensing phenomena such as pressure and temperature comprising a substantially U-shaped unitary piezoresistive element formed from a silicon crystal. When employed for sensing pressure and temperature, resistor means are provided along with means for coupling the first and second legs of the piezoresistive element in an electrical circuit to provide a temperature independent output indicative of the pressure imparted to one leg of the piezoresistive element, and for coupling the second leg and the resistor means to provide an output independent of the pressure imparted to the first leg and indicative of the environmental temperature. This configuration is particularly suitable for miniaturization and therefore useful for biomedical applications wherein the sensor can be inserted into a body transcutaneously by a catheter.
571 Citations
15 Claims
-
1. A pressure and temperature sensor comprising:
-
a piezoresistive element having first and second legs electrically interconnected at one end thereof; pressure imparting means for imparting pressures to be measured to only said first leg; resistor means exhibiting a predetermined value of resistance; first means for sensing resistance exhibited by said first and second legs of said piezoresistive element such that temperature variations in said first leg are compensated by corresponding temperature variations in said second leg to thereby provide an inherently temperature independent output signal corresponding to said pressure to be measured; and second means for sensing resistance exhibited by said second leg and said resistor means, said second means for providing a pressure independent output signal corresponding to environmental temperature. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. A pressure and temperature sensor comprising:
-
a first piezoresistive element; a second piezoresistive element electrically connected to said first piezoresistive element; pressure imparting means for imparting pressure to be measured to only said first piezoresistive element; resistor means exhibiting a predetermined value of resistance; first means for sensing resistance exhibited by said first and second piezoresistive elements such that temperature variations in said first element are compensated by corresponding temperature variations in said second leg to thereby provide an inherently temperature independent output signal corresponding to said pressure to be measured; and second means for sensing resistance exhibited by said second element and said resistor means, said second means providing a pressure independent output signal corresponding to environmental temperatures. - View Dependent Claims (13, 14, 15)
-
Specification