Cathode structure for thin film battery

• US 4,555,456 A
• Filed: 05/22/1984
• Issued: 11/26/1985
• Est. Priority Date: 05/26/1983
• Status: Expired due to Fees

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Ito, Yukio, Kanehori, Keiichi, Kudo, Tetsuichi, Kirino, Fumiyoshi, Miyauchi, Katsuki
• Primary Examiner(s): Hearn, Brian E.
• Assistant Examiner(s): Kalafut, Stephen J.
• Application Number:
  US06/612,857
• Time in Patent Office: 553 Days
• Field of Search: 429/218, 429/131
• US Class Current: 429/131
• CPC Class Codes: H01M 10/05 Accumulators with non-aqueous electrolyte H01M10/39 takes precedence
• CPC Class Codes: H01M 4/02 Electrodes composed of, or comprising, active material
• CPC Class Codes: H01M 4/581 Chalcogenides or intercalation compounds thereof
• CPC Class Codes: H01M 4/5815 Sulfides
• CPC Class Codes: H01M 4/66 Selection of materials
• CPC Class Codes: H01M 4/664 Ceramic materials
• CPC Class Codes: H01M 6/18 with solid electrolyte
• CPC Class Codes: Y02E 60/10 Energy storage using batteries

Abstract

A cathode structure for a thin film battery in which a titanium oxide layer is disposed on a substrate and has a titanium disulfide thin film disposed thereon. The cathode structure exhibits an excellent performance when applied to a lithium battery, a sodium battery, etc.

Claims

1. In a thin film battery comprising a cathode and anode sandwiching an electrolyte, the improvement comprising wherein the cathode structure comprises a titanium disulfide thin film as a cathode active material disposed on a substrate, with a layer of titanium oxide being formed between the substrate and the titanium disulfide thin film.

2. A thin film battery as defined in claim 1, said battery being selected from the group consisting of a lithium battery, a sodium battery and a copper battery.

3. A thin film battery as defined in claim 1, wherein said titanium oxide includes at least one member selected from the group consisting of TiO, TiO₂, Ti₂ O₃, Ti₃ O₅ and these compounds having oxygen vacancies.

4. A thin film battery as defined in claim 2, wherein the maximum amount of oxygen vacancies is 0.1.

5. A cathode structure for a thin film battery as defined in claim 1, wherein a thickness of said layer of titanium oxide falls within a range from 0.1 μ

m to 5.0 μ

m inclusive.

6. A thin film battery as defined in claim 1, wherein said titanium disulfide thin film is formed on said titanium oxide layer by chemical vapor deposition employing TiCl₄ and H₂ S as source gases under a reduced pressure of at most 30 kPa.

7. A thin film battery as defined in claim 6, wherein the temperature of the substrate during forming of the titanium disulfide thin film is 350°

-650°

C.