Pressure transducer with temperature compensation circuit

• US 4,556,807 A
• Filed: 08/11/1983
• Issued: 12/03/1985
• Est. Priority Date: 08/16/1982
• Status: Expired due to Term

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Kato, Kazuo, Sato, Hideo, Yamada, Kazuji, Kawakami, Kanji, Sasayama, Takao, Kanzawa, Ryosaku
• Primary Examiner(s): Miller, Stanley D.
• Assistant Examiner(s): HUDSPETH, DAVID R
• Application Number:
  US06/522,227
• Time in Patent Office: 845 Days
• Field of Search: 73/708, 73/720, 73/721, 73/726, 73/727, 307/491-493, 307/297, 307/308, 307/310, 323/312-314, 323/907, 338/3, 338/4
• US Class Current: 327/513
• CPC Class Codes: G01L 9/0054 integral with a semiconducting diaphragm
• CPC Class Codes: G01L 9/065 with temperature compensating means non electric temperature compensating means G01L19/04
• CPC Class Codes: Y10S 323/907 Temperature compensation of semiconductor

Abstract

A pressure transducer is disclosed comprising a pressure sensor portion having gage resistors in bridge formed on a thin diaphragm of a semiconductor substrate, and a power supply connected to the pressure sensor portion for driving the pressure sensor. The power supply includes a first current source for supplying a temperature-dependent current equivalent to the sum of a current almost proportional to the absolute temperature and a current independent of temperature, and a second current source for sinking the current almost proportional to the temperature characteristic of the gage resistors from the current of the first current source. A temperature compensation circuit is additionally provided to drive the bridge circuit by the difference between the temperature-dependent current and the current proportional to the temperature characteristic in a constant-current driving mode, and by a voltage proportional to the current difference when the output of the bridge circuit is connected to an amplifier whose gain is dependent on temperature.

Claims

1. A pressure transducer comprising:

a semiconductor substrate including a thin diaphragm;

a pressure sensor portion including a bridge connection of gage resistors formed on said diaphragm;

a first current source connected to said pressure sensor portion and making up a power supply for driving said pressure sensor portion, said first current source supplying a current equivalent to the sum of a current substantially proportional to the absolute temperature and a current independent of temperature; and

a second current source for sinking the current substantially proportional to the temperature characteristic of said gage resistors from said first current source.

2. A pressure transducer according to claim 1, wherein said first current source includes first and second transistor circuits connected in parallel with each other, and a constant current source connected in parallel with said parallel connection of said first and second transistor circuits, the ratio of emitter areas of said first and second transistors being adjusted in accordance with the temperature characteristic required of the current to be supplied by said first current source.

3. A pressure transducer according to claim 2, wherein said second current source includes a second constant current source connected in series with a temperature-dependent resistor having the same temperature characteristic as said gage resistors, and a third transistor for producing a current proportional to the voltage across said temperature-dependent resistor.

4. A pressure transducer according to claim 1, wherein said bridge circuit is arranged to be driven by constant current, and the current obtained by sinking the current of said second current source from said first current source is directly supplied to said bridge circuit.

5. A pressure transducer according to claim 1, wherein an output of said bridge circuit is connected to an amplifier whose gain is dependent on temperature, said apparatus further comprising a resistor independent of temperature which is supplied with a current obtained by sinking the current of said second current source from the current of said first current source, and means for driving the bridge circuit by the voltage across said resistor independent of temperature.