Piezoelectric contamination detector
First Claim
1. A piezoelectric contamination detector comprising:
- a piezoelectric mesuring resonator having at least one thin-film temperature sensor integrated therewith;
a reference resonator;
a cooling/heting chamber housing said resonators;
a contamination shield separating said reference resonator from said measuring resonator;
an optical window in a wall of said cooling/heating chamber protecting said reference resonator from external contamination, said optical window being substantially transparent to heat radiation; and
a detector housing enclosing said cooling/heating chamber;
wherein exterior surfaces of the cooling/heating chamber and interior surfaces of the detector housing are at least partially treated with a thermal control coating having low thermo-optical emissivity but high reflectivity, thereby minimizing heat loss between the cooling/heating chamber and the detector housing.
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Accused Products
Abstract
A piezoelectric detector for determination of the mass or film thickness of gaseous, liquid or solid substances being adsorbed or condensed on the surface of a piezoelectric resonator, having at least one measuring resonator with at least one integrated thin-film sensor, one discrete or integrated on the resonator re-evaporation heating element, and a reference resonator separated from the measuring resonator with a contamination shield, and protected from contamination, but not from heat radiation, with an optical window, which all allow correction by electronic or numerical means of influences of temperature changes on the resonant frequency and of cut-angle deviations and the temperature differences between the resonators.
111 Citations
20 Claims
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1. A piezoelectric contamination detector comprising:
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a piezoelectric mesuring resonator having at least one thin-film temperature sensor integrated therewith; a reference resonator; a cooling/heting chamber housing said resonators; a contamination shield separating said reference resonator from said measuring resonator; an optical window in a wall of said cooling/heating chamber protecting said reference resonator from external contamination, said optical window being substantially transparent to heat radiation; and a detector housing enclosing said cooling/heating chamber; wherein exterior surfaces of the cooling/heating chamber and interior surfaces of the detector housing are at least partially treated with a thermal control coating having low thermo-optical emissivity but high reflectivity, thereby minimizing heat loss between the cooling/heating chamber and the detector housing. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A piezoelectric contamination detector comprising:
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a piezoelectric measuring resonator having at least one thin-film temperature sensor integrated therewith; a reference resonator; a cooling/heating chamber housing said resonators; a contamination shield separating said reference resonator from said measuring resonator; an optical window in a wall of said cooling/heating chamber protecting said reference resonator from external contamination, said optical window being substantially transparent to heat radiation; and a detector housing enclosing said cooling/heating chamber; wherein interior surfaces of the cooling/heating chamber are at least partially treated with a thermal control coating having thermo-optical emissivity and absorption values close to those of a black body, thereby providing high heat exchange between the cooling/heating chamber and the resonators.
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15. A small, low weight, low energy consumption piezoelectric contamination detector providing improved fast-transient thermal measurement capabilities for outgassing control in a vacuum, comprising:
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a detector housing having interior surfaces at least partially treated with a thermal coating having low thermal-optical emissivity but high reflectivity; a heating/cooling chamber within said housing having exterior surfaces at least partially treated with a thermal coating having low thermo-optical emissivity but high reflectivity and interior surfaces at least partially treated with a thermal coating having a thermo-optical emissivity similar to that of a black body; a thermo-electric element for heating or cooling said heating/cooling chamber; a measurement resonator and a reference resonator mounted side by side inside of said heating/cooling chamber, each said resonator having at least one thin-film temperature sensor integrated therewith; a contamination shield separating said reference resonator from said measurement resonator and from external contamination; a heat-transmitting optical window in a wall of at least one of said detector housing and said heating/cooling chamber for protecting said reference resonator from external contamination but not from thermal radiation; and heater means in said heating/cooling chamber for outbaking said measurement resonator. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification