Pressure transducer
First Claim
1. A transducer having a first sensing diaphragm and a second sensing diaphram each configured such that a first pressure (Pl) is applied to the first diaphragm and a second pressure (P2) is applied to the second diaphragm, and wherein both diaphragms are formed on a diaphragm wafer and means defining an enclosed common fluid cavity fluidly open to each diaphragm responsive to such pressure, said cavity being filled with a substantially non-compressible fluid such that deflection of the diaphragms is representative of the pressure differential (P1-P2), the first and second diaphragms being formed on the one substantially flat face of the diaphragm wafer.
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Accused Products
Abstract
A transducer has a first and second sensing diaphragm configured such that a first pressure P1 is applied to the first diaphragm and a second pressure P2 is applied to the second diaphragm and wherein both diaphragms are formed on the same substantially flat face of a diaphragm wafer. The transducer is configured such that each diaphragm responsive to P1 or P2 respectively also affects a fluid in a closed common fluid cavity such that the deflection of the diaphragm is representative of the pressure differential (P1-P2).
45 Citations
10 Claims
- 1. A transducer having a first sensing diaphragm and a second sensing diaphram each configured such that a first pressure (Pl) is applied to the first diaphragm and a second pressure (P2) is applied to the second diaphragm, and wherein both diaphragms are formed on a diaphragm wafer and means defining an enclosed common fluid cavity fluidly open to each diaphragm responsive to such pressure, said cavity being filled with a substantially non-compressible fluid such that deflection of the diaphragms is representative of the pressure differential (P1-P2), the first and second diaphragms being formed on the one substantially flat face of the diaphragm wafer.
- 6. A transducer having a first sensing diaphragm and a second sensing diaphragm each configured such that a first pressure (Pl) is applied to the first diaphragm and a second pressure (P2) is applied to the second diaphragm, and wherein both diaphragms are formed on a diaphragm wafer and wherein each diaphragm responsive to such pressure respectively also affects a fluid in an enclosed common fluid cavity such that deflection of the diaphragms is representative of the pressure differential (Pl-P2), the first and the second diaphragms being formed on one substantially flat face of the diaphragm wafer sensing means coupled to at least one of the diaphragms for measuring the differential pressure (Pl-P2), and an overpressure stop wafer means disposed on and bonded to the diaphragm wafer and for cooperating with the diaphragm wafer to form the common fluid cavity, and having support means for providing an overpressure stop for each of the diaphragms.
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10. A transducer having a first sensing diaphragm and a second sensing diaphragm each configured such that a first pressure (Pl) is applied to the first diaphragm and a second pressure (P2) is applied to the second diaphragm, and wherein both diaphragms are formed on a diaphragm wafer and wherein each diaphragm responsive to such pressure respectively also affects a fluid in an enclosed common fluid cavity filled with a substantially non-compressive fluid such that deflection of the diaphragms is representative of the pressure differential (Pl-P2), the diaphragm wafer having one substantially flat face, and separated recess means defined in the opposite face of the diaphragm wafer means from the one flate face to form separate reduced thickness locations defining the first and the second diaphragms.
Specification