Optical element comprising a transparent substrate and an antireflection coating for the near-infrared region of wavelengths

• US 4,568,140 A
• Filed: 09/12/1983
• Issued: 02/04/1986
• Est. Priority Date: 05/24/1983
• Status: Expired due to Fees

• Current Assignee: US Philips Corporation (Koninklijke Philips N.V.)
• Original Assignee: US Philips Corporation (Koninklijke Philips N.V.)
• Inventors: Haisma, Jan, van der Werf, Pieter
• Primary Examiner(s): Corbin, John K.
• Assistant Examiner(s): NOT, DEFINED
• Application Number:
  US06/531,115
• Time in Patent Office: 876 Days
• Field of Search: 350/1.6, 350/1.7, 350/164, 350/165, 350/166
• US Class Current: 359/359
• CPC Class Codes: C03C 17/3411 with at least two coatings of inorganic materials C03C17/36, C03C17/42 take precedence
• CPC Class Codes: C03C 17/3429 at least one of the coatings being a non-oxide coating
• CPC Class Codes: G02B 1/115 Multilayers

Abstract

An optical element comprises a transparent substrate. An antireflection coating is provided on the substrate for reducing reflections of wavelengths from approximately 700 nm to approximately 1700 nm. The coating comprises a plurality of stacked, uniform layers with refractive indices which decrease toward the top of the stack. A base coating is arranged between the layer stack and the substrate. The effective refractive index at the top of the base coating is at least 2.5, and the base coating is a graded index layer.

Claims

1. An antireflection coating on a transparent substrate having an index of refraction, said coating suppressing reflections of wavelengths from approximately 700 nanometers to approximately 1700 nanometers, said antireflection coating comprising:

a base coating on the substrate, said base coating having a bottom surface against the substrate and having a top surface remote from the substrate, said base coating having a graded refractive index between the top and bottom surfaces, the refractive index of the base coating at the bottom surface being equal to the refractive index of the substrate, the effective refractive index at the top surface of the base coating being at least 2.5; and

a top coating on the top of the base coating, said top coating having a plurality of homogeneous layers having refractive indices which decrease toward the top of the top coating.

2. An antireflection coating as claimed in claim 1, characterized in that:

the base coating is a single layer with a refractive index of at least 2.5 at the top surface thereof; and

the top coating comprises three homogeneous layers, each layer having an optical thickness equal to one-quarter of a reference wavelength.

3. An antireflection coating on a transparent substrate having an index of refraction, said coating suppressing reflections of wavelengths from approximately 700 nanometers to approximately 1700 nanometers, said antireflection coating comprising:

a base coating on the substrate, said base coating consisting of a single layer having a bottom surface against the substrate and having a top surface remote from the substrate, said base coating having a graded refractive index between the top and bottom surfaces, the refractive index of the base coating at the bottom surface being equal to the refractive index of the substrate, the refractive index at the top surface of the base coating being at least 3.5; and

a top coating on the top of the base coating, said top coating having a plurality of homogeneous layers having refractive indices which decrease toward the top of the top coating;

characterized in that the base coating consists essentially of a mixture of Si and Si₃ N₄.

4. An antireflection coating as claimed in claim 3, characterized in that:

the top coating comprises first, second, and third homogeneous layers, each layer having an optical thickness approximately equal to one-quarter of a reference wavelength;

the first layer has a refractive index of 1.38 and consists essentially of MgF₂ ;

the second layer has a refractive index of 2.2 and consists essentially of one of the materials from the group of Nb₂ O₅, TiN, Ta₂ O₅, and Sb₂ O₃ ; and

the third layer has a refractive index of 3.1 and consists essentially of one of the materials from the group of AlSb, amorphous Sb₂ S₃, and a mixture of Si and Si₃ N₄.

5. An antireflection coating on a transparent substrate having an index of refraction, said coating suppressing reflections of wavelengths from approximately 700 nanometers to approximately 1700 nanometers, said antireflection coating comprising:

a base coating on the substrate, said base coating consisting of a single layer having a bottom surface against the substrate and having a top surface remote from the substrate, said base coating having a graded refractive index between the top and bottom surfaces, the refractive index of the base coating at the bottom surface being equal to the refractive index of the substrate, the refractive index at the top surface of the base coating being at least 3.5; and

a top coating on the top of the base coating, said top coating having a plurality of homogeneous layers having refractive indices which decrease toward the top of the top coating;

characterized in that the base coating consists essentially of a mixture of Si, Si₃ N₄, and SiO₂.

6. An antireflection coating as claimed in claim 5, characterized in that:

the top coating comprises first, second, and third homogeneous layers, each layer having an optical thickness approximately equal to one-quarter of a reference wavelength;

the first layer has a refractive index of 1.38 and consists essentially of MgF₂ ;

the second layer has a refractive index of 2.2 and consists essentially of one of the materials from the group of Nb₂ O₅, TiN, Ta₂ O₅, and Sb₂ O₃ ; and

the third layer has a refractive index of 3.1 and consists essentially of one of the materials from the group of AlSb, amorphous Sb₂ S₃, and a mixture of Si and Si₃ N₄.

7. An antireflection coating on a transparent substrate having an index of refraction, said coating suppressing reflections of wavelengths from approximately 700 nanometers to approximately 1700 nanometers, said antireflection coating comprising:

a base coating on the substrate, said base coating consisting of a single layer having a bottom surface against the substrate and having a top surface remote from the substrate, and base coating having a graded refractive index between the top and bottom surfaces, the refractive index of the base coating at the bottom surface being equal to the refractive index of the substrate, the refractive index at the top surface of the base coating being at least 3.5; and

a top coating on the top of the base coating, said top coating having a plurality of homogeneous layers having refractive indices which decrease toward the top of the top coating;

characterized in that the base coating consists essentially of a mixture of GaP and GaN.

8. An antireflection coating as claimed in claim 7, characterized in that:

the top coating comprises first, second, and third homogeneous layers, each layer having an optical thickness approximately equal to one-quarter of a reference wavelength;

the first layer has a refractive index of 1.38 and consists essentially of MgF₂ ;

the second layer has a refractive index of 2.2 and consists essentially of one of the materials from the group of Nb₂ O₅, TiN, Ta₂ O₅, and Sb₂ O₃ ; and

the third layer has a refractive index of 3.1 and consists essentially of one of the materials from the group of AlSb, amorphous Sb₂ S₃, and a mixture of Si and Si₃ N₄.

9. An antireflection coating on a transparent substrate having an index of refraction, said coating suppressing reflections of wavelengths from approximately 700 nanometers to approximately 1700 nanometers, said antireflection coating comprising:

a base coating on the substrate, said base coating consisting of a single layer having a bottom surface against the substrate and having a top surface remote from the substrate, said base coating having a graded refractive index between the top and bottom surfaces, the refractive index of the base coating at the bottom surface being equal to the refractive index of the substrate, the refractive index at the top surface of the base coating being at least 3.5; and

a top coating on the top of the base coating, said top coating having a plurality of homogeneous layers having refractive indices which decrease toward the top of the top coating;

characterized in that the base coating consists essentially of a mixture of GaP, GaN, and Ga₂ O₃.

10. An antireflection coating as claimed in claim 9, characterized in that

the top coating comprises first, second, and third homogeneous layers, each layer having an optical thickness approximately equal to one-quarter of a reference wavelength;

the first layer has a refractive index of 1.38 and consists essentially of MgF₂ ;

the second layer has a refractive index of 2.2 and consists essentially of one of the materials from the group of Nb₂ O₅, TiN, Ta₂ O₅, and Sb₂ O₃ ; and

the third layer has a refractive index of 3.1 and consists essentially of one of the materials from the group of AlSb, amorphous Sb₂ S₃, and a mixture of Si and Si₃ N₄.

11. An antireflection coating on a transparent substrate having an index of refraction, said coating suppressing reflections of wavelengths from approximately 700 nanometers to approximately 1700 nanometers, said antireflection coating comprising:

a base coating on the substrate, said base coating consisting of a single layer having a bottom surface against the substrate and having a top surface remote from the substrate, said base coating having a graded refractive index between the top and bottom surfaces, the refractive index of the base coating at the bottom surface being equal to the refractive index of the substrate, the refractive index at the top surface of the base coating being at least 3.5; and

a top coating on the top of the base coating, said top coating having a plurality of homogeneous layers having refractive indices which decrease toward the top of the top coating;

characterized in that the base coating consists essentially of a mixture of PbS and ZnS.

12. An antireflection coating as claimed in claim 11, characterized in that:

the top coating comprises first, second, and third homogeneous layers, each layer having an optical thickness approximately equal to one-quarter of a reference wavelength;

the first layer has a refractive index of 1.38 and consists essentially of MgF₂ ;

the second layer has a refractive index of 2.2 and consists essentially of one of the materials from the group of Nb₂ O₅, TiN, Ta₂ O₅, and Sb₂ O₃ ; and

the third layer has a refractive index of 3.1 and consists essentially of one of the materials from the group of AlSb, amorphous Sb₂ S₃, and a mixture of Si and Si₃ N₄.

13. An antireflection coating on a transparent substrate having an index of refraction, said coating suppressing reflections of wavelengths from approximately 700 nanometers to approximately 1700 nanometers, said antireflection coating comprising:

a base coating on the substrate, said base coating consisting of a single layer having a bottom surface against the substrate and having a top surface remote from the substrate, said base coating having a graded refractive index between the top and bottom surfaces, the refractive index of the base coating at the bottom surface being equal to the refractive index of the substrate, the refractive index at the top surface of the base coating being at least 3.5; and

a top coating on the top of the base coating, said top coating having a plurality of homogeneous layers having refractive indices which decrease toward the top of the top coating;

characterized in that the base coating consists essentially of a mixture of PbS, ZnS, and a B-Na-Al-K glass.

14. An antireflection coating as claimed in claim 13, characterized in that:

the top coating comprises first, second, and third homogeneous layers, each layer having an optical thickness approximately equal to one-quarter of a reference wavelength;

the first layer has a refractive index of 1.38 and consists essentially of MgF₂ ;

the second layer has a refractive index of 2.2 and consists essentially of one of the materials from the group of Nb₂ O₅, TiN, Ta₂ O₅, and Sb₂ O₃ ; and

the third layer has a refractive index of 3.1 and consists essentially of one of the materials from the group of AlSb, amorphous Sb₂ S₃, and a mixture of Si and Si₃ N₄.

15. An antireflection coating on a transparent substrate having an index of refraction, said coating suppressing reflections of wavelengths from approximately 700 nanometers to approximately 1700 nanometers, said antireflection coating comprising:

a base coating on the substrate, said base coating having a bottom surface against the substrate and having a top surface remote from the substrate; and

a top coating on the top of the base coating, said top coating having first, second, and third homogeneous layers having refractive indices which decrease toward the top of the top coating, each layer having an optical thickness approximately equal to one-quarter of a reference wavelength;

characterized in that the base coating comprises;

a first inhomogeneous layer on the substrate, said layer having a graded refractive index which decreases from the bottom surface to the top surface, the refractive index of the base coating at the bottom surface being equal to the refractive index of the substrate; and

at least first and second homogeneous layers on the inhomogeneous layer, said layers having refractive indices which increase toward the top of the base coating;

wherein the effective refractive index at the top of the base coating is at least 2.5.

16. An antireflection coating as claimed in claim 15, characterized in that in sequence from the top to the bottom of the antireflection coating:

the first layer of the top coating has a refractive index of 1.39, has an optical thickness equal to one-quarter of the reference wavelength, and consists essentially of MgF₂ ;

the second layer of the top coating has a refractive index of 2.08, has an optical thickness equal to one-quarter of the reference wavelength, and consists essentially of Nb₂ O₅ ;

the third layer of the top coating has a refractive index of 2.52, has an optical thickness equal to 0.31 times the reference wavelength, and consists essentially of CdS;

the first homogeneous layer of the base coating has a refractive index of 2.08, has an optical thickness equal to one-quarter of the reference wavelength, and consists essentially of Nb₂ O₅ ; and

the second homogeneous layer of the base coating has a refractive index of 1.65, has an optical thickness equal to one-quarter of the reference wavelength, and consists essentially of Al₂ O₃.