Inversion-mode insulated-gate gallium arsenide field-effect transistors

• US 4,568,958 A
• Filed: 01/03/1984
• Issued: 02/04/1986
• Est. Priority Date: 01/03/1984
• Status: Expired due to Fees

• Current Assignee: General Electric Company
• Original Assignee: General Electric Company
• Inventors: Baliga, Bantval J.
• Primary Examiner(s): James, Andrew J.
• Assistant Examiner(s): Henn, Terri M.
• Application Number:
  US06/567,839
• Time in Patent Office: 763 Days
• Field of Search: 357/23.4, 357/23.2, 357/16, 357/22 MD
• US Class Current: 257/332
• CPC Class Codes: H01L 29/205 in different semiconductor regions , e.g. heterojunctions
• CPC Class Codes: H01L 29/4236 within a trench, e.g. trench gate electrode, groove gate electrode
• CPC Class Codes: H01L 29/7802 Vertical DMOS transistors, i.e. VDMOS transistors
• CPC Class Codes: H01L 29/7813 with trench gate electrode, e.g. UMOS transistors trench gate electrodes per se H01L29/4236

Abstract

Inversion-mode insulated field-effect transistor structures are provided wherein a lightly-doped GaAs drift or drain region is combined with a gate-controlled channel structure comprising a film or layer of a semiconductor layer other than GaAs and within which inversion regions may more readily be formed. Suitable semiconductor materials for the gate-controlled channel structure are InP and Ga_x In_1-x As. Presently preferred is a Ga_x In_1-x As graded layer wherein x ranges from 1.0 to about 0.47.

Claims

1. An inversion-mode insulated-gate field-effect transistor comprising:

source and drain regions of one conductivity type separated by a shield base region of the opposite conductivity type;

said shield base region including a channel layer extending between said source and drain regions;

a gate electrode insulatively spaced from said channel layer and configured for inducing in said channel layer, when gate voltage is applied thereto, an inversion channel region conductively coupling said source and drain regions;

at least a portion of said drain region comprising gallium arsenide semiconductor material; and

at least a channel-supporting portion of said shield base region comprising a semiconductor material other than gallium arsenide and within which inversion regions may readily be formed, said channel layer being included in said channel-supporting portion.

2. An inversion-mode insulated-gate field-effect transistor in accordance with claim 1, wherein said shield base region comprises indium phosphide.

3. An inversion-mode insulated-gate field-effect transistor in accordance with claim 1, wherein both said shield base region and said source region comprise indium phosphide.

4. An inversion-mode insulated-gate field-effect transistor in accordance with claim 1, wherein said channel-supporting portion of said shield base region comprises gallim indium arsenide.

5. An inversion-mode insulated-gate field-effect transistor in accordance with claim 1, wherein both said channel-supporting portions of said shield base region and said source region comprise gallium indium arsenide.

6. An inversion-mode insulated-gate field-effect transistor in accordance with claim 4, wherein said shield base region comprises Ga_x In_1-x As with a graded concentration of In and having a maximum concentration of In corresponding to a minimum value of x in said channel-supporting portion.

7. An inversion-mode insulated-gate field-effect transistor in accordance with claim 6, wherein the minimum value of x is about 0.47.

8. An inversion-mode insulated-gate field-effect transistor in accordance with claim 1, wherein said gallium arsenide portion of said drain region comprises a relatively lightly-doped drift region defining a PN junction with said shield base region.

9. An inversion-mode insulated-gate field-effect transistor in accordance with claim 8, wherein said gallium arsenide portion of said drain region further comprises a relatively heavily-doped drain terminal region contiguous with said drift region and spaced from said shield base region by said drift region.

10. An inversion-mode insulated-gate field-effect transistor in accordance with claim 2, wherein said gallium arsenide portion of said drain region comprises a relatively lightly-doped drift region defining a PN junction with said shield base region.

11. An inversion-mode insulated-gate field-effect transistor in accordance with claim 10, wherein said gallium arsenide portion of said drain region further comprises a relatively heavily-doped drain terminal region contiguous with said drift region and spaced from said shield base region by said drift region.

12. An inversion-mode insulated-gate field-effect transistor in accordance with claim 4, wherein said gallium arsenide portion of said drain region comprises a relatively lightly-doped drift region defining a PN junction with said shield base region.

13. An inversion-mode insulated-gate field-effect transistor in accordance with claim 12, wherein said gallium arsenide portion of said drain region further comprises a relatively heavily-doped drain terminal region contiguous with said drift region and spaced from said shield base region by said drift region.

14. An inversion-mode insulated-gate field-effect transistor in accordance with claim 1, having a recessed-gate structure and comprising:

a semiconductor body containing said source, drain and shield base regions and having a pair of opposed principal surfaces;

said drain, shield base and source regions constituting successive layers of alternate conductivity type, said drain region extending to one of said principal surfaces and said source region extending to the other of said principal surfaces;

at least one recess formed in said body extending from said other principal surface through said source and shield base regions;

said channel layer being contained in said shield base region adjacent the sidewalls of said recess; and

said gate electrode being located in said recess and insulatively spaced from the sidewalls of said recess.

15. An inversion-mode insulated-gate field-effect transistor in accordance with claim 14, wherein said recess comprises a trapezoidal groove.

16. An inversion-mode insulated-gate field-effect transistor in accordance with claim 14, wherein said recess comprises a flat-bottomed groove.

17. An inversion mode insulated-gate field-effect transistor in accordance with claim 14, wherein said drain region layer comprises gallium arsenide and said shield base and source region layers comprise indium phosphide.

18. An inversion-mode insulated-gate field-effect transistor in accordance with claim 1, having a DMOS configuration and comprising:

a semiconductor body containing said source, drain and shield base regions and having a pair of opposed principal surfaces;

said body including a gallium arsenide layer extending from one of said principal surfaces into said body;

said body including a graded semiconductor layer extending from an interface within said body with said gallium arsenide layer to the other of said principal surfaces, said graded semiconductor layer comprising gallium arsenide at said interface and comprising gallium indium arsenide at said other principal surface, wherein the percentage of indium ranges from substantially zero at said interface to a maximum concentration at said other principal surface;

said drain region of the one conductivity type comprising at least a portion of said gallium arsenide layer and a portion of said graded semiconductor layer, and extending to said other principal surface;

said shield base region of the opposite conductivity type being situated within said drain regions extending at least into said graded semiconductor layer, and having a periphery terminating at said other principal surface; and

said source region of the one conductivity type being situated within said shield base region and having a periphery terminating at said other principal surface within and spaced from the periphery of said shield base region to define the extent of said channel layer, said channel layer terminating at said other principal surface.

19. An inversion-mode insulated-gate field-effect transistor in accordance with claim 18, wherein said shield base region extends through said graded semiconductor layer into said gallium aresenide layer.

20. An inversion-mode insulated-gate field-effect transistor in accordance with claim 18, wherein said graded semiconductor layer comprises Ga_x In_1-x As, wherein x ranges from about 1.0 at said interface to about 0.47 at said other principal surface.