Fiber optic sensor for detecting very small displacements of a surface

• US 4,572,949 A
• Filed: 12/14/1983
• Issued: 02/25/1986
• Est. Priority Date: 04/14/1982
• Status: Expired due to Term

• Current Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford University)
• Original Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford University)
• Inventors: Kino, Gordon S., Bowers, John E.
• Primary Examiner(s): Nelms, David C.
• Assistant Examiner(s): Gatto, J.
• Application Number:
  US06/565,091
• Time in Patent Office: 804 Days
• Field of Search: 250/227, 250/231 R, 356/350, 356/351, 356/358, 356/371, 73/655, 73/656, 73/657
• US Class Current: 250/227.27
• CPC Class Codes: G01D 5/268 using optical fibres G01D5/28 - G01D5/38 take precedence
• CPC Class Codes: G01H 9/006 the vibrations causing a variation in the relative position of the end of a fibre and another element

Abstract

A light source (10) coupled to a first fiber optic waveguide (14) which is coupled by a first directional coupler (22) and a second directional coupler (24) to a second waveguide (20). The first waveguide (14) has a phase modulator (60), a delay loop (62) and a polarization controller (68) therein to cause a differential delay time T on counterpropagating coherent light waves phase modulated at a frequency 1_M. The first directional coupler (22) has one part connected to a photodector (28) and the second directional coupler (24) has a probe (20D) coupled to the first fiber (14) and the second fiber (20). The probe directs light toward a surface (18) whereupon the counterpropagating waves are shifted in phase by an amount proportional to the amplitude of displacement of the surface 18.

Claims

1. An apparatus for detecting small displacements of a surface comprising:

a first directional coupler for dividing a single coherent light signal into first and second coherent light signals;

a first delay line for delaying said first coherent signal relative to said second coherent light signal by a first delay period to provide a delayed first light signal;

a waveguide for directing each of said delayed first and said second light signals onto said surface to produce a first reflected light signal corresponding to said delayed first light signal and a second reflected light signal corresponding to said second light signal;

a second delay line for delaying said second reflected light signal by said first delay period to produce a second delayed reflected light signal; and

a detector for measuring the phase difference between said first reflected light signal and said second delayed reflected light signal to measure variations in the geometric path length between said waveguide and said surface.

2. An apparatus as defined in claim 1, wherein said single coherent light signal which is divided by said first directional coupler is a continuous wave of light having a coherence time which is less than said first delay period.

3. An apparatus as defined in claim 1 wherein said single light signal which is divided by said first directional coupler is comprised of a coherent light pulse said pulse having a duration less than said first delay period imposed by said first delay line.

4. An apparatus as defined in claim 2 or 3 wherein said first directional coupler is a 3 dB coupler for evenly slitting said first coherent light signal into said first and second coherent light signals.

5. An apparatus as defined in claim 1 wherein said first delay line is a first fiber optic waveguide and wherein said second coherent light signal is guided to said waveguide by a second fiber optic waveguide which is shorter than said first fiber optic waveguide by an amount sufficient to cause said first coherent light signal to be delayed relative to said second coherent light signal by said first delay period.

6. An apparatus as defined in claim 5 wherein said first and second fiber optic waveguides are coupled together by a second directional coupler and wherein said waveguide is coupled to said first and second fabric optic waveguides by said second directional coupler.

7. An apparatus as defined in claim 6 wherein said second directional coupler recombines said delayed first light signal and said second coherent light signal into two light signals in said waveguide.

8. An apparatus as defined in claim 7 wherein said second directional coupler is bidirectional in that it splits said first reflected light signal into a third reflected light signal which is coupled into said second fiber optic waveguide and a fourth reflected light signal which is coupled into said first fiber optic waveguide and such that said second reflected light signal is split into a fifth reflected light signal which is coupled into said second fiber optic waveguide and a sixth reflected light signal which is coupled into said first fiber optic waveguide.

9. An apparatus as defined in claim 7 wherein said first directional coupler is bidirectional such that it couples part of each of said third, fourth, fifth and sixth reflected light signals to the input of said detector.

10. An apparatus as defined in claim 9 wherein said detector is a photodetector for detecting the intensity of the combined signal resulting from said third and sixth reflected light signals.

11. An apparatus as defined in claim 5 or 6 or 7 or 8 or 9 or 10 further comprising a phase modulator means located in either said first or said second fiber optic waveguides for causing a continuous periodically time varying phase difference in each of the light signals travelling in said first and second fiber optic waveguides.

12. An apparatus as defined in claim 11 wherein said detector generates an output signal component which has an amplitude which is proportional to the amplitude of the surface displacement and which amplitude varies in time at the difference frequency between the frequency of the surface displacement and the frequency of said phase modulator means.

13. An apparatus as defined in claim 12 wherein said detector includes a means for filtering out output signal components at frequencies other than said difference frequency and for integrating said difference frequency component over a plurality of periods of said difference frequency.

14. An apparatus as defined in claim 3 wherein said pulses are also of a duration less than the period of the surface displacement to be sensed.

15. An apparatus as defined in claim 14 wherein said detector has a bandwidth greater than the center frequency of the surface displacement to be sensed.

16. An apparatus as defined in claim 6 or 7 or 8 or 9 or 10 or 14 or 15 further comprising a polarization controller means located in either said first or said second fiber optic waveguide between said first directional coupler and said second directional coupler for causing the portions of said first and second reflected light signals which travel the same geometric path length between said couplers to arrive at said detector in the same polarization.

17. An apparatus as defined in claim 16 wherein said first light signal has a coherence length such that light travelling the longest geometric path to said surface and back to said detector does not interfere with light travelling the shortest geometric path, and wherein said polarization controller means causes the portions of said first and second light signals which travel and same geometric path to said detector arrive there shifted in relative phase by π

/2 radians.

18. A method of sensing small movements of a surface comprising the steps of:

directing first and second optical signals to a surface, said first signal preceding said second signal by a time T;

receiving third and fourth optical signals reflected from said surface in response to said first and second optical signals, said third signal preceding said fourth signal;

delaying said third optical signal by a time T, thereby providing a delayed third optical signal; and

causing interference between said delayed third optical signal and said fourth optical signal to determine the relative phase shift therebetween.

19. The method as defined by claim 18 and further including the step of detecting the amplitude of the combined signal caused by said interference.

20. The method as defined by claim 18 wherein said first and second optical signals are pulses.

21. The method as defined by claim 18 wherein said first and second optical signals are continuous wave signals generated by a short coherence length source.

22. The method of claim 19 further comprising the steps of:

phase modulating the first and second optical signals at a modulation frequency which is related to the frequency of movement of said surface such that the difference frequency between the modulation frequency and the surface movement frequency lies within a predetermined range; and

detecting the amplitude of said combined signal at said difference frequency.

23. The method of claim 19 further comprising the steps of:

intensity modulating said first and second optical signals at a modulation frequency related to the frequency of movement of said surface such that the difference frequency lies within a predetermined range; and

detecting the amplitude of said combined signal at said difference frequency.

24. The method of claim 22 further comprising the steps of:

intensity modulating said first and second optical signals at a second modulation frequency;

detecting the amplitude of said combined signal at either the sum or difference frequency between said modulation frequency and said second modulation frequency to provide a first detected signal;

detecting the amplitude of said combined signal at the difference frequency between said modulation frequency and the frequency of movement of said surface to provide a second detected signal; and

dividing said second detected signal by said first detected signal to provide a measure of the amplitude of the surface movement which is substantially independent of sample reflectivity.

25. A surface acoustic wave sensor comprising:

a light source;

a first optical fiber connected to receive light from said light source;

light detector means;

a second optical fiber connected to transmit light to said light detector means;

a first directional coupler through which said first and second optical fibers pass;

a second directional coupler through which said first and second optical fibers pass; and

a segment of optical fiber extending from said second directional coupler for directing light from said second directional coupler to a sample and for returning reflected light from said sample to said second directional coupler.

26. The surface acoustic wave sensor as defined by claim 25 wherein said first optical fiber is a different length than said second optical fiber between said first and second directional couplers.

27. The surface acoustic wave sensor as defined by claim 26 wherein said one of said first and second optical fibers between said first and second directional couplers includes a phase modulator.

28. The surface acoustic wave sensor as defined by claim 27 wherein said detector includes a lockin amplifier.

29. The surface acoustic wave sensor as defined by claim 26 or 27 wherein one of said first and second optical fibers between said first and second directional couplers includes a polarization controller.

30. The surface acoustic wave sensor as defined by claim 29 wherein said detector includes a lockin amplifier.

31. A method of sensing a surface acoustic wave comprising the steps of:

directing first and second optical signals to a surface, said first signal preceding said second signal by a time, T;

receiving third and fourth optical signals reflected from said surface in response to said first and second optical signals, respectively;

delaying said third optical signal by a time, T, thereby providing a delayed third optical signal; and

combining said delayed third optical signal and said fourth optical signal thereby providing a combined signal.

32. The method as defined by claim 31 and further including the step of detecting said combined signal.

33. The method as defined by claim 32 wherein said first and second optical signals are pulses and said step of detecting includes detecting the amplitude of said combined signal.

34. The method as defined by claim 32 wherein said first and second optical signals are continuous wave signals generated by a short coherence length source.

35. The method as defined by claim 34 and further including the step of intensity modulating said continuous wave signals.

36. The method as defined by claim 34 and further including the steps of detecting at least two signals and dividing said signals to minimize dependence on the reflectivity of said surface.