Integrated dual-range pressure transducer
First Claim
1. A pressure transducing device, comprising:
- a beam element having a first region which is sensitive to stresses produced by flexing of the beam element and a second region which is relatively insensitive to such stresses;
a pressure-responsive diaphragm formed in said second region of said beam element;
first sensing means, disposed on said first region of said beam element, for sensing the stresses induced therein by the flexing of said beam element; and
second sensing means, disposed on said diaphragm, for sensing the stresses induced in said diaphragm in response to a pressure applied thereto.
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Accused Products
Abstract
A pressure transducing device in the form of a beam includes a monolithic chip of silicon or similar material which is mechanically supported at and near its two opposed ends and unsupported in a flexible region between the two ends. The flexible, unsupported region is one of maximized sensitivity to stresses produced by deflection or flexing of the beam due to, e.g., a differential pressure applied across it. An integral, pressure-responsive diaphragm is formed in the supported area of the chip near one of its mechanically-supported ends. This area of the chip is relatively insensitive to stresses produced by beam flexing or deflection; rather, it responds to stresses produced by a pressure (e.g., a static pressure) applied directly to its surface. A first set of strain gauges is provided in the flexible chip region, and a second set on the surface of the integral diaphragm. Thus, a single transducing element is formed which provides separate output signals simultaneously indicative of both differential and static pressures experienced by, respectively, the unsupported chip region and the surface of the integral diaphragm.
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Citations
28 Claims
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1. A pressure transducing device, comprising:
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a beam element having a first region which is sensitive to stresses produced by flexing of the beam element and a second region which is relatively insensitive to such stresses; a pressure-responsive diaphragm formed in said second region of said beam element; first sensing means, disposed on said first region of said beam element, for sensing the stresses induced therein by the flexing of said beam element; and second sensing means, disposed on said diaphragm, for sensing the stresses induced in said diaphragm in response to a pressure applied thereto. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A pressure transducing device, comprising:
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a beam element having a supported region and an unsupported region, said unsupported region being relatively sensitive to stresses induced by the flexing of said beam element in response to pressure applied thereto; a pressure-responsive diaphragm formed integrally with said beam element in said supported region; a first plurality of strain gauges, disposed on said unsupported region of said beam element, responsive to the stresses induced in said unsupported region by the flexing of said beam element, and producing a first output signal proportional to the flexing of said beam element; and a second plurality of strain gauges, disposed on said diaphragm, responsive to the pressure-induced stresses in said diaphragm and producing a second output signal proportional to the pressure applied to said diaphragm. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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21. A pressure transducing device of the type including a beam having a monolithic, pressure-responsive beam element, said beam element having a flexible, pressure-responsive region and a plurality of strain-sensitive elements in said flexible region, said strain-sensitive elements being responsive to the pressure-induced stresses in said flexible region and producing an output signal proportional to the pressure inducing such stresses, wherein the improvement comprises:
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a second pressure-responsive region in said monolithic beam element; and a second plurality of strain-sensitive elements in said second pressure-responsive region responsive to the pressure-induced stresses in said second pressure-responsive region and producing a second output signal proportional to the pressure which is inducing the stresses in said second pressure-responsive region; wherein said flexible pressure-responsive region is responsive to pressures within a first pressure range and said second pressure-responsive region is responsive to pressures within a second pressure range different from said first pressure range. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28)
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Specification