Wafer box
First Claim
1. A wafer box comprising:
- a wafer box body of a rectangular parallelpiped shape having a plurality of parallel wafer inserting grooves formed in inner side surfaces thereof extending in a vertical direction, a plurality of parallel fixing plate inserting grooves formed in inner end surfaces thereof extending in a vertical direction, and an open upper part;
at least one fixing plate having a plurality of wafer receiving grooves formed on at least one side thereof, both ends of said at least one plate being shaped so as to be detachably insertable into a selected pair of said fixing plate inserting grooves in said wafer box body;
first and second buffer members respectively received between said side surfaces of said wafer box body and said at least one fixing plate to support wafers received in said box from upper and lower sides thereof; and
a closure for covering said upper part.
1 Assignment
0 Petitions
Accused Products
Abstract
A wafer box having a variable wafer slot size including a wafer box body of a rectangular parallelpiped shape having parallel wafer inserting grooves formed in inner side surfaces thereof extending in a vertical direction, a plurality of parallel fixing plate inserting grooves formed in the end surfaces and extending in a vertical direction, and an open upper part. At least one fixing plate, also having a plurality of wafer receiving grooves formed on at least one surface thereof, is inserted into a selected pair of the fixing plate inserting grooves. Both ends of the plate are shaped so as to be easily insertable and removable. Buffer members are placed between the side surfaces in the upper and lower portions of the box to support the wafers from the upper and lower sides thereof. A closure covers the upper part of the box.
46 Citations
7 Claims
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1. A wafer box comprising:
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a wafer box body of a rectangular parallelpiped shape having a plurality of parallel wafer inserting grooves formed in inner side surfaces thereof extending in a vertical direction, a plurality of parallel fixing plate inserting grooves formed in inner end surfaces thereof extending in a vertical direction, and an open upper part; at least one fixing plate having a plurality of wafer receiving grooves formed on at least one side thereof, both ends of said at least one plate being shaped so as to be detachably insertable into a selected pair of said fixing plate inserting grooves in said wafer box body; first and second buffer members respectively received between said side surfaces of said wafer box body and said at least one fixing plate to support wafers received in said box from upper and lower sides thereof; and a closure for covering said upper part. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification